Výsledky vyhledávání - "Yuko Tsutsui Ito"

Akademický článek

Stratified polymer dissolution model based on impedance data from quartz crystal microbalance method

Autor: Yuqing Jin, Yuko Tsutsui Ito, Takahiro Kozawa, Takashi Hasebe, Kazuo Sakamoto, Makoto Muramatsu

Publikováno v: Applied Physics Express, Vol 17, Iss 8, p 086502 (2024)

In lithography, the development process is essential for achieving high fidelity. The quartz crystal microbalance (QCM) method is a primary tool for analyzing the dissolution kinetics of resist polymers by measuring their frequency and impedance. How

Externí odkaz: https://doaj.org/article/e3cf8e06d0684f73ae5926a5b62d78ea

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Classification of dissolution modes of partially protected poly(4-hydroxystyrene) in tetraalkylammonium hydroxide aqueous solutions

Autor: Hitomi Betsumiya, Yuqing Jin, Yuko Tsutsui Ito, Takahiro KOZAWA, Kazuo Sakamoto, Makoto Muramatsu

Publikováno v: Japanese Journal of Applied Physics.

The development of high-numerical aperture exposure tools for extreme ultraviolet lithography is in progress. The development process (the dissolution of resist films) is the key to fine patterning. The dissolution dynamics of acidic polymers (the ba

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::933b46dc3ac233a53b7f3bfdabfff6f0
https://doi.org/10.35848/1347-4065/acd59c

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Intramolecular electron transfer from biopterin to Fe

Autor: Kazuo, Kobayashi, Yuko Tsutsui, Ito, Yuri, Kasu, Masaki, Horitani, Takahiro, Kozawa

Publikováno v: Journal of inorganic biochemistry. 238

Nitric oxide synthase (NOS) is a cytochrome P450-type mono‑oxygenase that catalyzes the oxidation of L-arginine to nitric oxide. We previously observed that intramolecular electron transfer from biopterin to Fe

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=pmid________::717faf8dbcdb3f9b0a6a97335095a90f
https://pubmed.ncbi.nlm.nih.gov/36327499

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Dissolution dynamics of partially protected poly(4-hydroxystyrene) in tetraalkylammonium hydroxide aqueous solution

Autor: Hitomi Betsumiya, Yuko Tsutsui Ito, Takahiro Kozawa, Kazuo Sakamoto, Makoto Muramatsu

Publikováno v: Japanese Journal of Applied Physics. 62:036503

A 0.26 M tetramethylammonium hydroxide (TMAH) aqueous solution has been used as a standard developer for manufacturing semiconductor devices. Alternative developers have recently attracted much attention because the 0.26 M TMAH developer may be appro

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::917177ce75445146925c84b8ed69d3e5
https://doi.org/10.35848/1347-4065/acc222

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Effects of photoacid generator decomposition on dissolution kinetics of poly(4-hydroxystyrene) in tetraalkylammonium hydroxide aqueous solutions

Autor: Yutaro Iwashige, Yuko Tsutsui Ito, Takahiro Kozawa, Kazuo Sakamoto, Makoto Muramatsu

Publikováno v: Japanese Journal of Applied Physics. 62:036502

For the advancement of lithography, the resist materials and processes are the most critical factors. In particular, the process of developing resist materials is important in reducing the line width roughness and stochastic defects. In this study, a

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::de1f62bf410a4f074aab4ecbc6b92377
https://doi.org/10.35848/1347-4065/acbcb6

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Intramolecular electron transfer from biopterin to FeII-O2 complex in nitric oxide synthases occurs at very different rates between bacterial and mammalian enzymes: Direct observation of a catalytically active intermediate

Autor: Kazuo Kobayashi, Yuko Tsutsui Ito, Yuri Kasu, Masaki Horitani, Takahiro Kozawa

Publikováno v: Journal of Inorganic Biochemistry. 238:112035

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::e79db7c80490319b19915f2c9541fac0
https://doi.org/10.1016/j.jinorgbio.2022.112035

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Swelling and dissolution kinetics of poly(4-hydroxystyrene) in tetrabutylammonium hydroxide (TBAH) aqueous solutions studied by quartz crystal microbalance (QCM) method—in comparison with tetramethylammonium hydroxide (TMAH) aqueous solutions

Autor: Yuko Tsutsui Ito, Hitomi Betsumiya, Takahiro Kozawa, Kazuo Sakamoto, Makoto Muramatsu

Publikováno v: Japanese Journal of Applied Physics. 61:066506

The dissolution (including the formation of a transient swelling layer) of a resist polymer is key to realizing ultrafine patterning. However, the details of the dissolution of resist polymers remain unclarified. In this study, the swelling and disso

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::80ac6c41d350f26925c1975f73d3d092
https://doi.org/10.35848/1347-4065/ac6c11

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Relationship between surface free energy and development process (swelling and dissolution kinetics) of poly(4-hydroxystyrene) film in water and 2.38 wt% tetramethylammonium hydroxide aqueous solution

Autor: Takahiro Kozawa, Yuko Tsutsui Ito

Publikováno v: Japanese Journal of Applied Physics. 61:016502

With the sharpening of optical images, the capability of resist materials has become a serious concern in lithography. The dissolution of a resist polymer is key to the realization of ultrafine patterning. However, the details of the dissolution of r

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::70d80d6bf750bd9b51ab8939f969d515
https://doi.org/10.35848/1347-4065/ac3d42

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