Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Yukitaka Yamaguchi"'
Autor:
Shinya Yoshida, Kenji Komaki, Yukitaka Yamaguchi, Shuji Tanaka, Ryoma Miyake, Mario Kiuchi, Tsuyoshi Takemoto
Publikováno v:
2020 IEEE SENSORS.
Monocrystalline-like epitaxial PZT films for commercial use are described for piezoelectric MEMS applications. The composition ratios of Zr and Ti in the films are Morphotropic phase boundary (52:48) and Ti rich (42:58). The films with a thickness of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e0d1722ee05be5d6658dc017c4ffe2e1
https://doi.org/10.1109/sensors47125.2020.9278888
https://doi.org/10.1109/sensors47125.2020.9278888
Autor:
Kenji Komaki, Ryoma Miyake, Shuji Tanaka, Yukitaka Yamaguchi, Tsuyoshi Takemoto, Mario Kiuchi, Shinya Yoshida
Publikováno v:
2020 IEEE International Ultrasonics Symposium (IUS).
Monocrystalline-like epitaxial PZT films for commercial use are described for piezoelectric MEMS applications. Films at the morphotropic phase boundary (MPB) with a thickness of 1 µm to 2 µm exhibit a typical transverse piezoelectric d31 coefficien
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2166426b289951df1600a922b1dd36c8
https://doi.org/10.1109/ius46767.2020.9251537
https://doi.org/10.1109/ius46767.2020.9251537