Zobrazeno 1 - 10
of 32
pro vyhledávání: '"Yukinori HIROSE"'
Autor:
Tessai Sugiura, Atsuyoshi Uranishi, Taiji Kobayashi, Yasuda Toshihiro, Yukinori Hirose, Fujio Terai, Sakamoto Naoya
Publikováno v:
Volume 1: Beyond Design Basis; Codes and Standards; Computational Fluid Dynamics (CFD); Decontamination and Decommissioning; Nuclear Fuel and Engineering; Nuclear Plant Engineering.
In January 2012, Toshiba Energy Systems & Solutions Corporation inserted a camera into the damaged Primary Containment Vessel (PCV) of Fukushima Daiichi Nuclear Power Station unit 2 for the first time since the Great East Japan Earthquake. Since then
Autor:
Koyu Asai, Kyoichiro Asayama, Koji Nakamae, Nobuyoshi Hattori, Yukinori Hirose, N. Murata, Keiichiro Kashihara, Shuichi Kudo, Toru Koyama, Kazuyoshi Maekawa, Tadashi Yamaguchi, Toshiharu Katayama
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 27:16-21
This is the first paper to reveal the formation mechanism of the abnormal growth of nickel silicide that causes leakage-current failure in complementary metal-oxide- semiconductor (CMOS) devices by using advanced transmission electron microscope (TEM
Autor:
Yukinori Hirose, Kenichi Mori, Kazuhito Honda, Koyu Asai, Masayuki Kojima, Kazuyoshi Maekawa, Naohito Suzumura, Akira Uedono
Publikováno v:
Microelectronic Engineering. 85:2137-2141
The reliability of Cu interconnects was successfully improved by applying a CuAl alloy seed. However, the effect of additive Al on the reliability is not fully understood. In order to reveal the reliability improvement mechanism, Cu films using CuAl
Autor:
Yukinori Hirose, Akira Uedono, Kouichi Tsuji, Hiroshi Miyazaki, Kazuyoshi Maekawa, Kazuhito Honda
Publikováno v:
BUNSEKI KAGAKU. 56:465-470
Cuデュアルダマシン配線の信頼性向上策として,合金シードを用いた配線形成プロセスが提案されている.本研究では,二次イオン質量分析法,電子線後方散乱回析,低速陽電子消滅法
Autor:
Yukinori Hirose, Koji Fukumoto
Publikováno v:
Journal of the Surface Finishing Society of Japan. 54:21-25
Publikováno v:
Microelectronics Reliability. 37:1615-1618
We discuss the improvement on a three-dimensional analysis of multilayer wiring process failure. We have applied this technique to Al-plug multilayer wiring and have successfully confirmed the precise failure point three-dimensionally without causing
Autor:
Yukinori Hirose, H. Kimura, Nobuyoshi Hattori, Shuichi Kudo, M. Mizuo, Junichi Tsuchimoto, Tadashi Yamaguchi
Publikováno v:
Extended Abstracts of the 2013 International Conference on Solid State Devices and Materials.
Autor:
Akio Nishida, K. Eguchi, Masao Inoue, Koji Nakamae, Shuichi Kudo, K. Funayama, Yukinori Hirose, Nobuyoshi Hattori, Kyoichiro Asayama, K. Ohgata, Toru Koyama
Publikováno v:
2013 IEEE International Reliability Physics Symposium (IRPS).
A detailed structural analysis of Hf-doped SiON dielectrics was performed by using advanced physical analysis techniques: Cs-corrected scanning transmission electron microscopy (STEM) and three-dimensional (3-D) atom-probe (AP) tomography. We confirm
Autor:
M. Mizuo, Nobuyoshi Hattori, Tadashi Yamaguchi, Yukinori Hirose, H. Kimura, Junichi Tsuchimoto, Shuichi Kudo
Publikováno v:
Extended Abstracts of the 2012 International Conference on Solid State Devices and Materials.
Autor:
Takashi Ide, Yorinobu Kunimune, Nobuyoshi Hattori, Toru Koyama, N. Nakanishi, Yukinori Hirose, H. Arie
Publikováno v:
Extended Abstracts of the 2011 International Conference on Solid State Devices and Materials.