Zobrazeno 1 - 10
of 20
pro vyhledávání: '"Yukimasa Mori"'
Fabrication and characterization of anatase/rutile–TiO2 thin films by magnetron sputtering: a review
Publikováno v:
Science and Technology of Advanced Materials, Vol 6, Iss 1, p 11 (2005)
This review article summarizes briefly some important achievements of our recent reserach on anatase and/or rutile TiO2 thin films, fabricated by helicon RF magnetron sputtering, with good crystal quality and high density, and gives the-state-of-the-
Externí odkaz:
https://doaj.org/article/79d4405c453e44ad9587cd78fa2b3dec
Publikováno v:
Applied Surface Science. 254:308-311
Five-layered Si/Si x Ge 1− x films on Si(1 0 0) substrate with single-layer thickness of 30 nm, 10 nm and 5 nm, respectively were prepared by RF helicon magnetron sputtering with dual targets of Si and Ge to investigate the feasibility of an indust
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bcfc6ddcb88f12e3c0a47fbbdfb9c33c
https://doi.org/10.1016/j.apsusc.2007.07.066
https://doi.org/10.1016/j.apsusc.2007.07.066
Autor:
Kenji Kaneko, Shoichi Toh, Yukimasa Mori, Masaki Tanemura, Y. Kajino, Lei Miao, Sakae Tanemura, Y. Itano
Publikováno v:
Journal of Materials Science: Materials in Electronics. 18:43-46
We have succeeded to fabricate the thin films (350 nm in total thickness) consisting of semiconducting Vanadium-oxide (VO0.9+x (0.30≦x < 0.37)) nano-particles with 3.47 nm in averaged diameter by using the combined magnetron sputtering and gas aggr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1b4cec86cd73a1f7891a18031452b593
https://doi.org/10.1007/s10854-007-9182-z
https://doi.org/10.1007/s10854-007-9182-z
Autor:
Sakae Tanemura, Yukimasa Mori
Publikováno v:
Applied Surface Science. 253:3856-3859
We studied the chemical state of semiconducting and metallic SmS thin films by X-ray photoelectron spectroscopy (XPS), which were fabricated using dual-target magnetron sputtering by controlling the power applied to both metal and chalcogenide target
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e8eb73f77098f350eb43c9a418eb3b3b
https://doi.org/10.1016/j.apsusc.2006.08.011
https://doi.org/10.1016/j.apsusc.2006.08.011
Autor:
Masaki Tanemura, Shoichi Toh, Yukimasa Mori, Lei Miao, Yoichi Kajino, Sakae Tanemura, Kenji Kaneko
Publikováno v:
Japanese Journal of Applied Physics. 46:356-361
We have succeeded in fabricating a thin film consisting of semiconducing TiN nanoparticles soft-landed on a substrate at room temperature using N2 reactive magnetron sputtering combined with a gas aggregation method. The total film thickness is about
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::39f20f263c27b1c2087f47e97d3abfd7
https://doi.org/10.1143/jjap.46.356
https://doi.org/10.1143/jjap.46.356
Autor:
Kyoichi Sawabe, Takashi Iida, Yukimasa Mori, Kosuke Shobatake, Eri Maeta, Shunsuke Koide, Hiroaki Sakai, Morimichi Watanabe
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 23:1638-1646
Studies on the thermal reaction behavior of polycrystalline cubic silicon carbide (SiC) with effusive xenon difluoride (XeF2) have been carried out over the sample temperature (Ts) range from 300to900K using molecular beam quadrupole mass spectrometr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6f8f35de246e9eb5099e2e7a68ceb9c8
https://doi.org/10.1116/1.2110387
https://doi.org/10.1116/1.2110387
Autor:
Morimichi Watanabe, Yukimasa Mori, Takahiro Ishikawa, Hiroaki Sakai, Takashi Iida, Keijiro Akiyama, Shogo Narita, Kyoichi Sawabe, Kosuke Shobatake
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 23:1647-1656
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::376dd917dfe5992bca4d55362bf7d286
https://doi.org/10.1116/1.2110395
https://doi.org/10.1116/1.2110395
Autor:
Kenji Kaneko, Shoichi Toh, Masaki Tanemura, Yukimasa Mori, Lei Miao, Sakae Tanemura, Wilfried Wunderlich
Publikováno v:
Science and Technology of Advanced Materials. 6:11-17
This review article summarizes briefly some important achievements of our recent reserach on anatase and/or rutile TiO2 thin films, fabricated by helicon RF magnetron sputtering, with good crystal quality and high density, and gives the-state-of-the-
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5314fe3ecb418bbea014ca0aee6504f5
https://doi.org/10.1016/j.stam.2004.06.003
https://doi.org/10.1016/j.stam.2004.06.003
Autor:
P. Jin, Sakae Tanemura, Nataliya Nabatova-Gabain, Asuka Terai, S. Koide, Yukimasa Mori, Lei Miao
Publikováno v:
Applied Surface Science. 238:360-366
Optical properties of both metal and semiconductor phases of SmS thin films on Si substrate grown at a room temperature by dual targets (dc for metal Sm and rf for pressed powdered chalcogenide Sm 2 S 3 ) magnetron sputtering system with the concurre
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::47e18f4c59a9657908c172c8fdcdf887
https://doi.org/10.1016/j.apsusc.2004.05.221
https://doi.org/10.1016/j.apsusc.2004.05.221
Publikováno v:
Applied Surface Science. 228:292-296
Charging in depth profiling in X-ray photoelectron spectroscopy (XPS) for metal layers on insulated substrates (Au/Cr/SiO 2 (quartz)) was studied both with and without conduction between a specimen and a spectrometer (i.e., the conducting mode and th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5c9416bb339f4b9c818c138dd64065c9
https://doi.org/10.1016/j.apsusc.2004.01.023
https://doi.org/10.1016/j.apsusc.2004.01.023