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Autor:
Takashi Futatsuki, Nahomi Aoto, Yasuhiko Kasama, Takashi Imaoka, Shinya Yamasaki, Yukimari Yamashita, Hidemitsu Aoki, Koji Yamanaka, Kenichi Mitsumori
Publikováno v:
Langmuir. 15:4165-4170
Electrolyzed water (EW) has been applied to the wet cleaning in ultra-large-scale integration (ULSI) and liquid-crystal display (LCD) manufacturing processes. For supplying ultrapure EW as cleaning solutions in this field, an electrolytic cell compos
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5e03ec673a0abef66300c7c989bddc99
https://doi.org/10.1021/la981153r
https://doi.org/10.1021/la981153r
