Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Yukihiko Morokuma"'
Publikováno v:
Journal of Physics D: Applied Physics. 37:432-437
We measured the density normalized ionization coefficients and attachment coefficients in diluted c-C4F8/Ar mixtures and in pure perfluorocyclobutane (c-C4F8) by the steady-state Townsend method. The ionization coefficients in the mixture gas are alm
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2b88e73ff0d39444e185a801b1be436b
https://doi.org/10.1088/0022-3727/37/3/021
https://doi.org/10.1088/0022-3727/37/3/021
Publikováno v:
IEEJ Transactions on Fundamentals and Materials. 116:993-997
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5d7eda24dea1fbcaee08ed82de45f83c
https://doi.org/10.1541/ieejfms1990.116.11_993
https://doi.org/10.1541/ieejfms1990.116.11_993
Publikováno v:
Journal of Physics D: Applied Physics. 22:505-511
The structure of the cylindrical DC glow discharge in SiH4is presented by solving a basic set of equations, consisting of the electron, ion, gas molecule and radical continuity equations, and Poisson's equation. The electron swarm parameters are then
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6259c969f750c8f93a0dfc1e620ff20e
https://doi.org/10.1088/0022-3727/22/4/007
https://doi.org/10.1088/0022-3727/22/4/007