Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Yuka Tonsho"'
Publikováno v:
Scientific Reports, Vol 12, Iss 1, Pp 1-9 (2022)
Abstract The quality factor (Q-factor) is an important parameter for mechanical resonant sensors, and the optimal values depend on its application. Therefore, Q-factor control is essential for microelectromechanical systems (MEMS). Conventional metho
Externí odkaz:
https://doaj.org/article/dc61568f1e9a456fa34790fa3c86738e