Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Yuji Kodaira"'
Publikováno v:
IEEJ Transactions on Fundamentals and Materials. 120:987-993
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::62858e2842970283e934983f6fa8448f
https://doi.org/10.1541/ieejfms1990.120.11_987
https://doi.org/10.1541/ieejfms1990.120.11_987
Autor:
Teruhiko Kumada, Atsuko Sasahara, Kazuyuki Maetoko, Kunihiro Hosono, Takemichi Honma, Yuji Kodaira, Yukio Nakashiba, Masaoshi Tsuzuki, Yasutaka Kikuchi
Publikováno v:
SPIE Proceedings.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e6b252513cd0789d6114b26c3e775fff
https://doi.org/10.1117/12.476955
https://doi.org/10.1117/12.476955
Autor:
Jun Yoshida, Naoki Takahashi, Yuko Oi, Masayoshi Tsuzuki, Jun Kotani, Yuji Kodaira, Yuichi Matsuzawa, Yoshiro Yamada
Publikováno v:
SPIE Proceedings.
Improvement of Critical Dimension (CD) accuracy is one ofthe most important issues for high-end reticle fabrication. Two major obstacles remain even after careftil CD optimization efforts. One is foggy effect, which is related to writing system, and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b0d562451cfe9c16c9cd31b9cb22e71c
https://doi.org/10.1117/12.410702
https://doi.org/10.1117/12.410702