Zobrazeno 1 - 10
of 26
pro vyhledávání: '"Yuji, Hosaka"'
Autor:
Masahiko Ishino, Thanh-Hung Dinh, Shigeki Owada, Yasunari Maekawa, Masaharu Nishikino, Yuichi Inubushi, Hiroki Yamamoto, Yuya Kubota, Yuji Hosaka, Akira Kon
Publikováno v:
Advances in Patterning Materials and Processes XL.
Autor:
Yuji Hosaka1 hosaka@sejong.ac.kr
Publikováno v:
Journal of East Asia & International Law. 2021, Vol. 14 Issue 1, p161-178. 18p.
Autor:
Yuji, Hosaka, Hiroki, Yamamoto, Masahiko, Ishino, Dinh, Thanhhung, Masaharu, Nishikino, Akira, Kon, Shigeki, Owada, Yuichi, Inubushi, Yuya, Kubota, Yasunari, Maekawa
Publikováno v:
Journal of photopolymer Science and Technology. 34(1):95-98
Irradiation effects of PMMA induced by femtosecond-pulsed extreme ultraviolet (EUV) were investigated using Soft X-ray free electron laser (SXFEL) for realization of next generation lithography. The sensitivity of PMMA upon exposure to femtosecond-pu
Autor:
Yuji Hosaka, Nobuyuki Nishimori, Toshiro Itoga, Shingo Nakazawa, Shinichiro Tanaka, Toshio Seno, Chikara Kondo, Takahiro Inagaki, Toru Fukui, Takahiro Watanabe, Hitoshi Tanaka
Publikováno v:
Japanese Journal of Applied Physics. 61:076504
We investigated the radiation damage process of commercially available light-emitting diode (LED) lightings in an X-ray radiation environment such as the electron storage ring SPring-8. It was found that metal-oxide-semiconductor field-effect transis
STUDY ON IRRADIATION EFFECTS BY FEMTOSECOND-PULSED EXTREME ULTRAVIOLET IN MAIN-CHAIN SCISSION RESIST
Autor:
Hosaka, Yuji, Yamamoto, Hiroki, Ishino, Masahiko, Dinh, Thanhhung, Nishikino, Masaharu, Maekawa, Yasunari, Yuji, Hosaka, Hiroki, Yamamoto, Masahiko, Ishino, Masaharu, Nishikino, Yasunari, Maekawa
Femtosecond-pulsed extreme ultraviolet (EUV) of free-electron laser (FEL) is the most potential candidates for a next-generation EUV lithography light source. However, the physical events and chemical reactions in resist materials, induced by EUV wit
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=jairo_______::e8abfeebea60e256bd98c991648c515e
https://repo.qst.go.jp/records/81103
https://repo.qst.go.jp/records/81103
Autor:
Yuji Hosaka, Thanh-Hung Dinh, Takeshi Higashiguchi, Masakazu Washio, Kazuyuki Sakaue, Noboru Hasegawa, Masaharu Nishikino, Yasunari Maekawa, Satoshi Ichimaru, Masahiko Ishino, Hiroki Yamamoto, Akira Sasaki, Tadashi Hatano, Masatoshi Hatayama, Kimio Yoshimura
Publikováno v:
Applied optics. 59(12)
We have developed a soft x-ray laser (SXRL) beamline equipped with an intensity monitor dedicated to ablation study such as surface processing and damage formation. The SXRL beam having a wavelength of 13.9 nm, pulse width of 7 ps, and pulse energy o
Autor:
Tomoya Uchida, Takafumi Kondoh, Masakazu Washio, Tomoko Gowa Oyama, Mitsumasa Taguchi, Yoichi Yoshida, Yuji Hosaka
Publikováno v:
Journal of Photopolymer Science and Technology. 31:85-90
Autor:
Yuji Hosaka1 hosaka@sejong.ac.kr
Publikováno v:
Journal of East Asia & International Law. 2017, Vol. 10 Issue 1, p157-177. 21p.
Autor:
Yuji Hosaka
Publikováno v:
Minjok yeonku. 76:62-62
Autor:
Yuji Hosaka
Publikováno v:
Japan’s Island Troubles with China and Korea
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::137f571ff601c3b21cccf2e3f8434536
https://doi.org/10.4324/9781315111438-6
https://doi.org/10.4324/9781315111438-6