Zobrazeno 1 - 1
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pro vyhledávání: '"Yuichi Maruko"'
Publikováno v:
Japanese Journal of Applied Physics. 41:7134-7138
In precise positioning equipment such as an XY stage, the linear actuator (motor) is indispensable. In the practical application of such a linear motor, two motional functions of small displacement and large displacement are usually required. Both su
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0da737f338ca205e1775a7993b468889
https://doi.org/10.1143/jjap.41.7134
https://doi.org/10.1143/jjap.41.7134
