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pro vyhledávání: '"Yue Hu Jesper"'
Autor:
Luo Meng, Lin Zhou, Xuefeng Zeng, Shailendra Mishra, Yue Hu Jesper, Cornel Bozdog, Han Taejoon, Thaung-Htun Oo, Oded Cohen, Hyunchul Jung, Alok Vaid, Shi Yong Ju, Paul Isbester, Wen Pin Peng, Liping Cui
Publikováno v:
ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference.
Ever increasing complexity in advanced patterning and new multilayer integration schemes pose significant development and control challenges as industry transits to 2x and below technology node. Accurate process characterization with quick turn-aroun
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ac44dca7383d4f47695dd3254b57d096
https://doi.org/10.1109/asmc.2013.6552745
https://doi.org/10.1109/asmc.2013.6552745
