Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Yudhi Kandel"'
Autor:
Dominic Ashworth, Xibin Zhou, Patrick P. Naulleau, Yashesh Shroff, Greg Denbeaux, Yudhi Kandel, Ryan Miyakawa, Kevin Cummings, Yu-Jen Fan, Michael Goldstein
Publikováno v:
SPIE Proceedings.
We present an update of the AIS wavefront sensor, a diagnostic sensor set for insertion in the upgraded 0.5 NA SEMATECH Albany and Berkeley METs. AIS works by using offset monopole illumination to probe localized regions of the test optic pupil. Vari
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d5e2f7d674539ff46f57368ca07b0e07
https://doi.org/10.1117/12.2048389
https://doi.org/10.1117/12.2048389
Autor:
Dominic Ashworth, Michael Goldstein, Yashesh Shroff, Xibin Zhou, Yu-Jen Fan, Ryan Miyakawa, Gregory Denbeaux, Yudhi Kandel, Patrick P. Naulleau, Kevin Cummings
Publikováno v:
Extreme Ultraviolet (EUV) Lithography IV.
We present a new form of optical testing for exposure tools based on measuring localized wavefront curvature. In this method, offset monopole illumination is used to probe localized regions of the test optic pupil. Variations in curvature manifest as
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9ef10997ac4a08249664edeb6554f850
https://doi.org/10.1117/12.2013880
https://doi.org/10.1117/12.2013880