Zobrazeno 1 - 10
of 32
pro vyhledávání: '"Yudai Kamada"'
Autor:
Akihiro Koyama, Yusuke Sugita, Atsushi Isobe, Yudai Kamada, Munenori Degawa, Toshiyuki Mine, Takashi Kawamoto
Publikováno v:
2022 IEEE Sensors.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::aa18bf2753cca4242166fbc463272d25
https://doi.org/10.1109/sensors52175.2022.9967248
https://doi.org/10.1109/sensors52175.2022.9967248
Autor:
Yudai Kamada, K. Watanabe, Takashi Oshima, Taizo Yamawaki, Akira Matsumoto, Keijiro Mori, Naoki Mori, Tomonori Sekiguchi, Yuki Furubayashi, Atsushi Isobe
Publikováno v:
IEEE Journal of Solid-State Circuits. 55:2539-2552
A fully integrated micro-electromechanical system (MEMS) accelerometer with extremely low noise level (22 ng/ $\surd $ Hz) and sufficiently low power consumption (17 mW) for emerging applications (such as infrastructure monitoring and next-generation
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8022e542ed913d1dbe6e89c6ab1458d4
https://doi.org/10.1109/jssc.2020.2991533
https://doi.org/10.1109/jssc.2020.2991533
Autor:
Takashi Oshima, Tomonori Sekiguchi, Yudai Kamada, Chisaki Takubo, Yuki Furubayashi, Atsushi Isobe, Noriyuki Sakuma
Publikováno v:
IEEE Sensors Journal. 20:1184-1190
We propose a design method for a thick membrane with several thousand perforations suitable for low-noise capacitive micro-electro-mechanical systems (MEMS) accelerometers. Although we have already reported that a membrane with two-step perforations
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::194adbc01bffbb0d1c95a9fe7618377c
https://doi.org/10.1109/jsen.2019.2948172
https://doi.org/10.1109/jsen.2019.2948172
Autor:
Takashi Oshima, Atsushi Isobe, Tatemi Ido, Yuki Furubayashi, Yudai Kamada, Tomonori Sekiguchi
Publikováno v:
Journal of Microelectromechanical Systems. 28:401-408
A capacitive MEMS accelerometer with superior features, namely low cost, low noise, and low-power consumption, for a large sensor network was developed. To achieve both low noise and low-power consumption, a sensor architecture with a unique perforat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::134c558b115bee66c5aeaaaae22f2a18
https://doi.org/10.1109/jmems.2019.2903349
https://doi.org/10.1109/jmems.2019.2903349
Autor:
Takashi Oshima, Yuki Furubayashi, Keijiro Mori, Hideto Kazama, Taizo Yamawaki, Tomonori Sekiguchi, Naoki Mori, Atsushi Isobe, K. Watanabe, Akira Matsumoto, Yudai Kamada
Publikováno v:
ISSCC
In emerging applications such as next-generation oil and gas exploration and infrastructure monitoring, a large number of highly sensitive accelerometers need to be deployed. The fully integrated MEMS accelerometer in this work achieves both the extr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8828c572669fa72cdd49cd6623e6a424
https://doi.org/10.1109/isscc.2019.8662331
https://doi.org/10.1109/isscc.2019.8662331
Autor:
Chisaki Takubo, K. Watanabe, Atsushi Isobe, Yasushi Tainaka, Yuki Furubayashi, Noriyuki Sakuma, Tomonori Sekiguchi, Takashi Oshima, Yudai Kamada
Publikováno v:
2018 IEEE SENSORS.
A method is presented for designing a thick membrane with several thousand perforations suitable for low-noise capacitive micro-electro-mechanical systems (MEMS) accelerometers. Although a membrane with two-step perforations shows good noise density
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8991a8dcd6815d3dea52d15fd2aa2817
https://doi.org/10.1109/icsens.2018.8589945
https://doi.org/10.1109/icsens.2018.8589945
Autor:
K. Watanabe, Chisaki Takubo, Atsushi Isobe, Naoki Mori, Yasushi Tainaka, Yuki Furubayashi, Yudai Kamada, Noriyuki Sakuma, Takashi Oshima, Keijiro Mori, Akira Matsumoto, Tomonori Sekiguchi, Hideto Kazama
Publikováno v:
2018 IEEE Micro Electro Mechanical Systems (MEMS).
A capacitive MEMS accelerometer with superior features of low cost, noise and power consumption was developed for a large sensor network. A low noise floor of less than 30 nG/√Hz and a low power consumption of 20 mW with a low-cost getter-less vacu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::aa8070c04eb7498b1fa70260fe8e2b21
https://doi.org/10.1109/memsys.2018.8346711
https://doi.org/10.1109/memsys.2018.8346711
Autor:
Hideaki Kurata, Yudai Kamada, Atsushi Isobe, Daisuke Ryuzaki, Nobuyuki Sugii, Kazuki Watanabe, Hasegawa Hiroaki, Tetsufumi Kawamura, Shinji Nishimura
Publikováno v:
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
This paper reports a novel method that reduces time for design customization of MEMS sensors. In this method, a design database (DB) that contains a variety of structural and characteristic parameter sets is built beforehand. Once required specificat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ee5e8db711f372c0831b2143cf1313f6
https://doi.org/10.1109/transducers.2017.7994490
https://doi.org/10.1109/transducers.2017.7994490
Autor:
Mutsumi Kimura, Mamoru Furuta, Yudai Kamada, Takahiro Hiramatsu, Tokiyoshi Matsuda, Takashi Hirao, Shizuo Fujita, Hiroshi Furuta, Chaoyang Li
Publikováno v:
ECS Transactions. 54:121-126
The trap densities (D t) in ZnO thin-film transistors (TFTs) with SiNx / SiOx stacked gate insulators fabricated using several N2O flow rate during SiOx deposition (R N2O) are extracted. It is found that the trap states consist of deep flat states an
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2cd8d092cc282b91e289ccd422473355
https://doi.org/10.1149/05401.0121ecst
https://doi.org/10.1149/05401.0121ecst
Autor:
Yudai Kamada, Dapeng Wang, Shizuo Fujita, Chaoyang Li, Takashi Hirao, Toshiyuki Kawaharamura, Shinichi Shimakawa, Mamoru Furuta, Takahiro Hiramatsu
Publikováno v:
Applied Surface Science. 258:695-699
The structural and optical properties of ZnO thin films deposited at various oxygen partial pressure and rf-power of rf magnetron sputtering were investigated. The sputtered ZnO films are mainly formed with the oxygen which was supplied from a sputte
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b1101860a75dbe852c639e056720711b
https://doi.org/10.1016/j.apsusc.2011.07.100
https://doi.org/10.1016/j.apsusc.2011.07.100