Zobrazeno 1 - 1
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pro vyhledávání: '"Yuan-Ku Lan"'
Autor:
Hsueh-Jen Tsai, Chia-Hung Chen, Myungjun Lee, Kuo-Yao Chou, Mark D. Smith, Jo-Lan Chin, Jen-Chou Huang, Hao-Lun Huang, Chen Dror, Healthy Huang, Jui-Chin Yang, Yuan-Ku Lan, Michael E. Adel, Harvey Cheng, Jinyan Song, Tal Itzkovich, Ady Levy, Yaniv Abramovitz, Chin-Chang Huang, I-Lin Wang, Hsien-Yen Lung
Publikováno v:
SPIE Proceedings.
We present a novel metrology target design framework using the scanner exit pupil wavefront analysis together with Zernike sensitivity analysis (ZSA) based on the Monte-Carlo technique. The proposed method enables the design of robust metrology targe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f7fce7d6ac86885d3ff9888443f23af9
https://doi.org/10.1117/12.2218659
https://doi.org/10.1117/12.2218659
