Zobrazeno 1 - 10
of 28
pro vyhledávání: '"Yu. N. Grigoryev"'
Publikováno v:
Thermophysics and Aeromechanics. 28:635-647
Publikováno v:
Journal of Applied Mechanics and Technical Physics. 62:361-370
Complete group analysis of the system of one-dimensional unsteady equations of the dynamics of a vibrationally excited gas is performed in the case of cylindrical and spherical symmetry. It is shown that the admitted Lie algebra does not contain the
Autor:
Yu. N. Grigoryev, I. V. Ershov
Publikováno v:
Journal of Applied Mechanics and Technical Physics. 62:11-17
The influence of thermal nonequilibrium on the laminar–turbulent transition is studied with the use of the $$\mathrm{e}^N$$ -method for two widespread flow regimes in a supersonic boundary layer at the Mach number $$\textrm{M}=4.5$$ . The set of th
Autor:
I. V. Ershov, Yu. N. Grigoryev
Publikováno v:
Fluid Dynamics. 54:1020-1037
An asymptotic theory of the neutral stability curve of a supersonic boundary layer in a vibrationally excited molecular gas on a flat plate is constructed. The equations of the two-temperature viscous heat-conducting gas dynamics are considered as th
Autor:
A. G. Gorobchuk, Yu. N. Grigoryev
Publikováno v:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 9:184-189
The hydrodynamic approach is used to simulate silicon passivation by unsaturated CFx radicals under plasma-chemical etching in CF4/H2. The plasma-chemical kinetics model contains 28 determinative gas-phase reactions with the participation of F, F2, C
Autor:
Yu. N. Grigoryev, I. V. Ershov
Publikováno v:
Journal of Applied Mechanics and Technical Physics. 44:471-481
The influence of thermal excitation on a finite-amplitude vortex disturbance in a shear flow of a molecular gas is studied in a model problem. The evolution of such vortex structures is typical of both the nonlinear stage of the laminar–turbulent t
Publikováno v:
Journal of Physics A: Mathematical and General. 32:L337-L343
An isomorphism of the Lie algebras L11 admissible by the full Boltzmann kinetic equation with an arbitrary differential cross section and by the Euler gas dynamics system of equations with a general state equation is set up. The similarity is also pr
Autor:
A. G. Gorobchuk, Yu. N. Grigoryev
Publikováno v:
2010 27th International Conference on Microelectronics Proceedings.
The effect of RF discharge structure on silicon etching process in CF 4 /O 2 mixture was studied. The calculations were carried out based on an advanced mathematical model of plasma-chemical reactor with taking into account a peculiarities of RF disc
Autor:
A. G. Gorobchuk, Yu. N. Grigoryev
Publikováno v:
2008 26th International Conference on Microelectronics.
The effect of O2 admixture concentration on silicon etching process in tetrafluoromethane - oxygen mixture is investigated on the base of numerical modeling. The calculations were carried out with using of the mathematical model of nonisothermal reac
Publikováno v:
Seventh International Conference on Numerical Methods in Fluid Dynamics ISBN: 9783540106944
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::11dffe672d183c1d87fa36ff9802dc3c
https://doi.org/10.1007/3-540-10694-4_70
https://doi.org/10.1007/3-540-10694-4_70