Zobrazeno 1 - 10
of 68
pro vyhledávání: '"Yu. M. Rumyantsev"'
Publikováno v:
Glass Physics and Chemistry. 44:607-615
A synthesis of thin films consisting of hydrogenated silicon oxycarbonitride using high-frequency discharge plasma from a novel organosilicon compound methyltris(diethylamino)silane (MTDEAS) mixed with oxygen and nitrogen are studied. CVD diagrams ar
Autor:
S. A. Prokhorova, E. A. Maksimovskii, Olga Maslova, Igor K. Igumenov, Sergey V. Sysoev, P. A. Stabnikov, Yu. M. Rumyantsev, A. E. Turgambaeva, B. V. Krisyuk
Publikováno v:
Russian Journal of Applied Chemistry. 91:1068-1075
Two heteroligand ketoiminate–diketonate complexes of copper(II), CuL(hfa) (1), L = pentane-2-imino-4-onato, CH3COCHCNHCH 3 – , and CuL′(hfa) (2), L′ = 2,2,6,6-tetramethyl-3-iminoheptane-5-onato, C(CH3)3COCHCNHC(CH)–, were studied as precurs
Autor:
M. N. Chagin, I. V. Yushina, V. R. Shayapov, Yu. M. Rumyantsev, Marina Kosinova, V. N. Kichai
Publikováno v:
Glass Physics and Chemistry. 44:174-182
Thin films of hydrogenated silicon carbide (SiCx:H) and carbonitride (SiCxNy:H) are synthesized in a reactor with inductively coupled RF plasma with the introduction of tetramethylsilane vapors and additive gases—argon and/or nitrogen. The process
Publikováno v:
Inorganic Materials. 54:133-139
Using mechanochemical synthesis, we have prepared zirconium borohydride, Zr(BH4)4, as a precursor for ZrB2 film growth by chemical vapor deposition. We have carried out the thermodynamic modeling of phase formation processes in the Zr–B–(N)–H a
Autor:
A. G. Plekhanov, Yu. M. Rumyantsev, V. S. Sulyaeva, Marina Kosinova, E. A. Maksimovskii, N. I. Fainer
Publikováno v:
Protection of Metals and Physical Chemistry of Surfaces. 53:1187-1191
Results concerning a quantitative determination of elemental composition of films consisting of light elements based on the use of wavelength dispersive spectroscopy (WDS) and energy dispersive spectroscopy are presented. The films were previously st
Publikováno v:
Journal of Structural Chemistry. 58:824-827
The crystal structure of a hexanuclear Na(I) complex based on 3,5-dimethyl-1H-pyrazole (C5H8N2) and its anion is determined (space group P21/c, a = 12.2194(5) A, b = 24.1554(9) A, c = 11.3311(4) A, β = 109.942(1)°, V = 3143.99(8) A3, Z = 2). The cr
Publikováno v:
Protection of Metals and Physical Chemistry of Surfaces. 53:253-260
Dielectric films of hydrogenated silicon oxycarbonitride SiC x N y O z :H were prepared by plasmaenhanced chemical vapor deposition using gas mixtures of 1,1,1,3,3,3-hexamethyldisilazane (HMDS) or 1,1,3,3-tetramethyldisilazane (TMDS) with oxygen and
Publikováno v:
Glass Physics and Chemistry. 43:48-52
Thin silicon carbonitride SiCxNy films are synthesized by means of plasma enhanced chemical vapor deposition using an organosilicon compound such as bis(trimethylsilyl)ethylamine EtN(SiMe3)2 as the precursor in a mixture with hydrogen. The chemical c
Publikováno v:
Letters on Materials. 7:272-277
Autor:
V. R. Shayapov, Yu. M. Rumyantsev, A. G. Plekhanov, E. A. Maksimovskii, N. I. Fainer, A. N. Golubenko
Publikováno v:
Journal of Structural Chemistry. 58:119-125
Based on thermodynamic simulation on the deposition of condensed phases with the complex composition in the Si–C–N–O–H system in a wide temperature range, using initial gas mixtures of 1,1,3,3-tetramethyldisilazane (HSi(CH3)2)2NH (TMDS), TMDS