Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Yu. M. Chesnokova"'
Publikováno v:
Crystallography Reports. 62:597-601
The effect of He+ ion implantation and subsequent annealing on the silicon-on-sapphire microstructure is studied by transmission electron microscopy and X-ray diffraction analysis. It is established that He+ ion implantation leads to the formation of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::88a73961552a11429bcdea031275b073
https://doi.org/10.1134/s1063774517040058
https://doi.org/10.1134/s1063774517040058
