Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Yu-Sian Liu"'
Autor:
Yu-Sian Liu, Kuei-Ann Wen
Publikováno v:
Micromachines, Vol 10, Iss 1, p 50 (2019)
This paper presents the design, simulation and mechanical characterization of a newly proposed complementary metal-oxide semiconductor (CMOS)/micro-electromechanical system (MEMS) accelerometer. The monolithic CMOS/MEMS accelerometer was fabricated u
Externí odkaz:
https://doaj.org/article/90f1f979d0654acdadc96552c54d0d55
Autor:
Yu-Sian Liu, Kuei-Ann Wen
Publikováno v:
Micromachines, Vol 9, Iss 12, p 637 (2018)
A monolithic low noise and low zero-g offset CMOS/MEMS accelerometer and readout scheme in standard 0.18 μm CMOS mixed signal UMC process is presented. The low noise chopper architecture and telescopic topology is developed to achieve low noise. The
Externí odkaz:
https://doaj.org/article/96a632b845a04c74832e1e84a2a38f04
Autor:
Kuei-Ann Wen, Yu Sian Liu
Publikováno v:
Micromachines
Volume 10
Issue 1
Micromachines, Vol 10, Iss 1, p 50 (2019)
Volume 10
Issue 1
Micromachines, Vol 10, Iss 1, p 50 (2019)
This paper presents the design, simulation and mechanical characterization of a newly proposed complementary metal-oxide semiconductor (CMOS)/micro-electromechanical system (MEMS) accelerometer. The monolithic CMOS/MEMS accelerometer was fabricated u
Publikováno v:
EUROCON
A monolithic accelerometer design with zero-g calibration with TSMC 0.18 μm mixed-signal 1P6M process is presented. On-chip digital offset calibration enables compensation of random mechanical offset in the sensor due to process variation. The maxim