Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Yu-Shin Tan"'
Autor:
Yu-Shin Tan, 譚玉欣
93
A number of inspection and measurement stations are set in the fabrication process to ensure that the quality of wafer meets the requirement. Because of the limited capacities and costs for in-line wafer inspections, only certain wafers are i
A number of inspection and measurement stations are set in the fabrication process to ensure that the quality of wafer meets the requirement. Because of the limited capacities and costs for in-line wafer inspections, only certain wafers are i
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/38725120406504350222
Publikováno v:
Advances in Production Management Systems. Smart Manufacturing for Industry 4.0 ISBN: 9783319997063
APMS (2)
APMS (2)
Due to the shrinking IC device geometries and increasing interconnect layers, process complexity has been rapidly increasing and leads to higher manufacturing costs and longer cycle time. Thus, in-line metrology is set at various steps to inspect the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6a5323490feac8a72d38361584cfa7cd
https://doi.org/10.1007/978-3-319-99707-0_10
https://doi.org/10.1007/978-3-319-99707-0_10