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pro vyhledávání: '"Younghyuck Na"'
Autor:
Younghyuck Na, Gyeongho Hyun, Kwangho Jeong, Yeonjin Yi, Hyunbok Lee, Jonginn Im, Sungmoon Kim
Publikováno v:
Current Applied Physics. 19:1233-1237
Molecular flux distribution is critical information to obtain uniform thin films using the thermal evaporation technique in vacuum. However, the flux distribution is a quite complex function depending on the geometry of evaporation sources and the in
Autor:
Sungmoon Kim, Hyun Seo, Younghyuck Na, Daejun Chi, Sunggen Jo, Mingeun Kwak, Lee Jung Kyu, Eunsang Jung
Publikováno v:
SID Symposium Digest of Technical Papers. 48:1506-1508
Publikováno v:
SID Symposium Digest of Technical Papers. 47:1734-1736
We have developed the High temperature linear nozzle source (HT LNS). Scanning deposition method with HT LNS provides the solution which keeps high material efficiency of the low temperature linear source, while solving problems concerning high tempe