Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Young-Gil Seo"'
Publikováno v:
Wear. :794-799
Lapping for sapphire substrates was evaluated with respect to material removal modes. Firstly, a 3-body removal mode that consists of diamond slurry and a metal–resin platen was tested. The metal–resin platen was produced by mixing metal particle
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::64b838785d5d7505511c61c406111afb
https://doi.org/10.1016/j.wear.2015.02.029
https://doi.org/10.1016/j.wear.2015.02.029
Publikováno v:
Proceedings of International Conference on Planarization/CMP Technology 2014.
Glass ceramics is one of the key materials for the optoelectronic devices. Lapping is a critical technology which controls the thickness and flatness of the substrate. The modified lapping process using the fixed diamond abrasive pad with DIW (De-ion
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7a3e9bc1913c3b2e6174cfe2db1dc0cc
https://doi.org/10.1109/icpt.2014.7017309
https://doi.org/10.1109/icpt.2014.7017309
Publikováno v:
Proceedings of International Conference on Planarization/CMP Technology 2014.
In this study, the effects of large particle in chemical mechanical planarization (CMP) slurry were investigated on slurry distribution system, which utilizes a pumping device to circulate CMP slurry. Three different types of pumps (e.g., bellows, di
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8df2ea008ca39bd08791af3dd6471f9a
https://doi.org/10.1109/icpt.2014.7017293
https://doi.org/10.1109/icpt.2014.7017293
Autor:
Moon, Deog-Ju, Nagendra Prasad Yerriboina, Si-Hyeong Cho, Sung- Ho Park, Young-Gil Seo, Park, Jin-Goo
Publikováno v:
2015 International Conference on Planarization/CMP Technology (ICPT); 1/1/2015, p1-4, 4p
Autor:
Deog-Ju Moon, Nagendra Prasad Yerriboina, Si-Hyeong Cho, Sung-Ho Park, Young-Gil Seo, Jin-Goo Park
Publikováno v:
2015 International Conference on Planarization/CMP Technology (ICPT); 1/1/2015, p1-3, 3p