Zobrazeno 1 - 8
of 8
pro vyhledávání: '"Young Yeom, Geun"'
Autor:
Woo Hong, Jong, Woo Tak, Hyun, Il Cho, Nam, Joon Eoh, Hyeong, Ho Kim, Chan, Won Jeong, Jun, Lim Kim, Kyung, Jin Yoo, Hee, Min Cho, Hyun, Gwang Jeong, Yu, Woon Jung, Da, Jong Yeo, Yun, Young Yeom, Geun, Woo Kim, Dong
Publikováno v:
In Applied Surface Science 30 October 2024 671
Publikováno v:
In Surface & Coatings Technology 1 October 2005 200(1-4):780-783
Publikováno v:
RSC Advances; 2017, Vol. 7 Issue 26, p16104-16108, 5p
Publikováno v:
Current Nanoscience; August 2016, Vol. 12 Issue: 4 p477-481, 5p
Autor:
Hyeon-Soo Kim Hyeon-Soo Kim, Jong-Ku Yoon Jong-Ku Yoon, Young-Hyuk Lee Young-Hyuk Lee, Young-Wook Ko Young-Wook Ko, Jong-Wan Park Jong-Wan Park, Geun-Young Yeom Geun-Young Yeom
Publikováno v:
Japanese Journal of Applied Physics. 38:5788
Damage and residue remaining on the silicon wafer after oxide overetching using C4F8/H2 plasmas and the effects of various post treatments after the overetching on the formation of contact silicides were investigated. The Co silicides formed on the v
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::47f8474e827637c84c8db093b5662ed7
https://doi.org/10.1143/jjap.38.5788
https://doi.org/10.1143/jjap.38.5788
Publikováno v:
Japanese Journal of Applied Physics; December 2000, Vol. 39 Issue: 12 p7007-7007, 1p
Autor:
Jeong-Woon Bae, Jeong-Woon Bae, Sang-Woon Lee, Sang-Woon Lee, Kook-Hyun Song, Kook-Hyun Song, Jung-Il Park, Jung-Il Park, Kwang-Ja Park, Kwang-Ja Park, Young-Wook Ko, Young-Wook Ko, Geun-Young Yeom, Geun-Young Yeom
Publikováno v:
Japanese Journal of Applied Physics; May 1999, Vol. 38 Issue: 5 p2917-2917, 1p
Autor:
Young-Jun Lee, Young-Jun Lee, Soon-Won Hwang, Soon-Won Hwang, Kyung-Hee Oho, Kyung-Hee Oho, Jung-Yong Lee, Jung-Yong Lee, Geun-Young Yeom, Geun-Young Yeom
Publikováno v:
Japanese Journal of Applied Physics; December 1998, Vol. 37 Issue: 12 p6916-6916, 1p