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pro vyhledávání: '"Yota Ooki"'
Autor:
Toshiro Doi, Yoji Umezaki, Kei Kitamura, Yoji Matsukawa, Syuhei Kurokawa, Koichiro Ichikawa, Isamu Koshiyama, Yota Ooki, Yoshio Nakamura, Tadashi Hasegawa
Publikováno v:
Key Engineering Materials. :61-65
We designed and manufactured a prototype of a unique CMP machine, which can perform double-side CMP simultaneously in a sealed and pressure container as regarding effective action of the processing atmosphere around workpieces as important. Polishing
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c82c679f41656ce379a8c875a7290905
https://doi.org/10.4028/www.scientific.net/kem.447-448.61
https://doi.org/10.4028/www.scientific.net/kem.447-448.61
