[Untitled]

Autor: Yasuyuki Taneda, Harumi Maruyama, Megumi Nakamura, Yoshiki Hirano, Masako Inoue, Yoshiro Shiokawa

Publikováno v: Shinku. 50:234-240

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::7dd8d138e051b44f6ffb5fdb520308c8
https://doi.org/10.3131/jvsj.50.234

Detection of Cu(hfac)(tmvs) by Li+ ion attachment mass spectrometry

Autor: Toshihiro Fujii, Megumi Nakamura, Sundaram Arulmozhiraja, Yoshiro Shiokawa

Publikováno v: Chemical Physics Letters. 425:134-137

Li + ion attachment mass spectrometry was used to detect Cu(1,1,1,5,5,5-hexafluoroacetylacetonate)(vinyltrimethylsilane) [Cu(hfac)(tmvs)], a thermally labile precursor used in copper chemical vapor deposition (Cu-CVD), with the intent of developing i

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::a11652eefb12e4b59da31bb63396b893
https://doi.org/10.1016/j.cplett.2006.05.002

Detection of quasimolecular ion of Cu(hfac)(tmvs) by ion attachment mass spectrometry

Autor: Masao Takayanagi, Yoshiro Shiokawa, Toshihiro Fujii, Munetaka Nakata, Megumi Nakamura

Publikováno v: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 22:2347-2350

A molecular ion of (trimethylvinylsilane)(1,1,1,5,5,5-hexafluoroacetyl-acetonato)Cu(I) [Cu(hfac)(tmvs)], which could not be detected by mass spectrometry with conventional ionization techniques such as electron impact ionization because of weak coord

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::7f9b1a1c2bcfeebba9fbed2bd51ed381
https://doi.org/10.1116/1.1798751

In-Situ Analysis of Perfluoro Compounds in Semiconductor Process Exhaust by Ion Attachment Mass Spectrometry (IAMS)

Autor: Masao Takayanagi, Toshihiro Fujii, Munetaka Nakata, Kenji Hino, Yoshiro Shiokawa, Megumi Nakamura

Publikováno v: SHINKU. 45:846-853

A compact apparatus for ion-attachment mass spectrometry (IAMS) has been developed, which is used for in-situ analyses of exhaust gases including perfluoro compounds (PFCs) from a dry-etching machine generating cyclo-C4F 8/O 2/ Ar plasma. The soft at

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::3fb78ae7ec66c65e58789745a0f6d5b1
https://doi.org/10.3131/jvsj.45.846

[Untitled]

Autor: Masahito TAGAWA, Hitoshi AKIMICHI, Chiharu MAEDA, Masahiro HIRATA, Shin-ichi NISHIZAWA, Seiji HIROKI, Sadamitsu TANZAWA, Takashi ARAI, Tetsuya ABE, Katsusuke SHIMIZU, Jyun-nosuke NAKATANI, Shizuma KURIBAYASHI, Megumi NAKAMURA, Toru SASAKI, Yoshiro SHIOKAWA, Nozomu HATTORI, Takafumi MORII, Masaaki HIRAI, Masahiko KUSAKA, Motohiro IWAMI, Zhao-Xiong XIE, Kayo IWASE, Ken-ichi TANAKA, Toshimi SUTOU, Tomohiro UMEZAWA, Daisuke ESASHIKA, Shigeru SAITO, Tetsuo SOUMURA, Shuji ISONO, Hideki YAMASAKI, Hakuto MURAKAMI, Masahiko YAMAMOTO, Takuji OYAMA, Takashi IKUNO, Jeong-Tak Ryu, Shigeharu OHKURA, Yang-Gyu Baek, Shin-ichi HONDA, Mitsuhiro KATAYAMA, Masahiko KITAGAWA, Kenjiro OURA, Keiichi FUJIMOTO, Kuei-Yi LEE, Nobuhiko OTA, Shinji SHINABE, Yuto FUKUMA, Yusuke SUETSUGU, Yao-Jane HSU, Yasunori TANIMOTO, Youichirou HORI, Ken-ichi KANAZAWA, Masanori KOBAYASHI, Masahide GOTOH, Koichi SUDOH, Hiroshi IWASAKI, Keisuke KAMETANI, Touichi HATANO, Masato KIUCHI, Katsutoshi TANAKA, Seiji TAKECHI, Satoshi SUGIMOTO, Seiichi GOTO, Tsukasa KOBAYASHI, Ryoki TOBE, Teruo YANAGIHASHI, Tetsuro OBAYASHI, Shigemi SUGINUMA, Tetsuo OGAWA, Kiyohide KOKUBUN, Takashi SEKIDO, Ichiro TAKANO, Yoshio SAWADA, Yoshiaki SAKURAI, Akio OKAMOTO, Toshikazu NOSAKA, Hiroya NAKAJIMA, Hiroshi KODA, Masaaki YOSHITAKE, Toyohito UCHIZONO, Toshiaki YASUI, Hirokazu TAHARA, Takao YOSHIKAWA, Akio SUZUKI, Jun SAKAMOTO, Takeshi MITSUHASHI, Akihito MORI, Takanori AOKI, Tatsuhiko MATSUSHITA, Masahiro OKUDA, Hiroyuki NAKANO, Hideo FURUHASHI, Toshio YOSHIKAWA, Akinori MAEDA, Yoshiyuki UCHIDA, Kenzo KOJIMA, Asao OHASHI, Shizuyasu OCHIAI, Teruyoshi MIZUTANI, Yasuharu YAMASHITA, Shu KUROKAWA, Akira SAKAI, Tomohide SASAKI, Tetsuro SHIRAO, Nobuhiro KANEKO, Keniche SHUDO, Masatoshi TANAKA, Kaoru OJIMA, Masamichi YOSHIMURA, Kazuyuki UEDA, Joselito LABIS, Akihiko OHI, Toshinori FUJIKI, Tadao TODA, Hiroshi HARIMA, Nobumasa KIWA, Yasuhito GOTOH, Hiroshi TSUJI, Junzo ISHIKAWA, Yoichiro YGI, Kiminori KAKITANI, Hiroko KAJI, Akio YOSHIMORI, Kazuhiko HASEGAWA, Wilson A. Dino, Hideaki KASAI, Ayao OKIJI, Katsuhisa CHIDA, Tetsumi TANABE, Yoshitsugu ARAKAKI, Morio YOSHIZAWA, Kouji NODA, Katsuhiro NAKAMURA, Yasushi YAMANO, Shinichi KOBAYASHI, Yoshio SAITO, Yoshihiro SATOH, Tomio KUBO, Hideharu MATSUSHIMA, Ken KASUGA, Hiroki ASARI, Norihiko IMAIZUMI, Kentarou SEKIKAWA, Masahiro SHIBUSAWA, Keisuke TAJIRI, Zenzaburo KABEYA, Yoshikazu NAKAYAMA, Shin AKIDUKI, Kazuhiro HASHIMOTO, Masamitu TAKAHASI, Jun'ichiro MIZUKI, Kazuhisa TAMURA, Toshihiro KONDO, Kohei UOSAKI, Shigeharu TAMURA, Masato YASUMOTO, Nagao KAMIJO, Yoshio SUZUKI, Mitsuhiro AWAJI, Akihisa TAKEUCHI, Hidekazu TAKANO, Hiroshi ITOH, Hidehiko NONAKA, Shingo ICHIMURA, Masahiro TOSA, Kazutaka MITSUISHI, Masaki TAKEGUCHI, Yoshio FUKUDA, Masahiro GOTO, Akira KASAHARA, Kazuo FURUYA, Kazuhiro YOSHIHARA, Kazuhiko MIMOTO, Takashi MATSUMOTO, Kunio OKIMURA, Kimiko SATO, Tsutomu TAKAHASHI, Tadashi NAKAMURA, Naohiro HORII, Akihiro INOUE, Nobuharu OHSAKO, Takeshi MIYASHITA, Kengo HIDAKA, Atsushi TANAKA, Hisahiro TANGE, Yuji TANAKA, Katsumi NISHIMURA, Takashi KOJIMA, Nozomu TAKAGI, Tatsuo WAKAIDA, Takeo HOSAKA, Akira SAKAZAKI, Takahiro OKADA, Akihiro TANAKA, Yasunori Yamamura, Yoshiyuki MIZUNO, Teiichi HOMMA, Sin'ichi INOUE, Yuhjin YAMAZAKI, Toshiaki FUJINO, Tomohisa OKUNO, Ken-ichi OHTOMI, Ken'ichi MIURA, Itsuo ISHIGAMI, Hideaki HOSHINO, Tomoyuki MIZUKOSHI, Fumihiro URATANI, Hiroshi NAKANISHI, Won-chul Moon, Tatsuo YOSHINOBU, Osamu SUEKANE, Masakazu TANAKA, Toshiko OKUI, Katsuhito ARAKAWA, Shigehiko HASEGAWA, Hisao NAKASHIMA, Miwako KUBO, Hiroshi MORIKAWA, Shizuo FUJITA, Shigeo FUJITA, Toshinari YAMAZAKI, Toshio YOSHIZAWA, Toshio KIKUTA, Shigeki HIROBAYASHI, Noriyuki NAKATANI, Tatsuo YAMABUCHI, Masatomo NISHIURA, Toru KANAJI, Makoto TANAKA, Z. An

Publikováno v: SHINKU. 44:326-400

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::61a7d37ab4bac01e00e5c363e6c14596
https://doi.org/10.3131/jvsj.44.326