Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Yoshio Saruki"'
Publikováno v:
Journal of the Japan Society for Precision Engineering. 69:768-771
Publikováno v:
Optomechatronic Systems III.
We have developed a system for measuring the radius of curvature of a micro spherical surface whose radius is several 10 μm to several 100 μm. This measuring system can measure a spherical surface by two methods, namely a Linnik micro-interferomete
Autor:
Fujio Maeda, Toshitaka Shimomura, Yoshio Saruki, Shinichiro Aoyagi, Masaji Sawabe, Hisayoshi Sakai, Yasuyuki Yamaryo
Publikováno v:
SPIE Proceedings.
encorders and scales up to 1600mm. In the comparator, the interferometer is fully arranged in vacuum and the calibrationobjects are mounted under atmospheric conditions. The Abbe's principle in the alignment of workpiece with the measuringbeam is sat
Publikováno v:
SPIE Proceedings.
It is difficult to measure efficiently long gauge blocks by the interferometric method because long time is necessary for temperature run-in of long gauge blocks. The interferometer which can measure long gauge blocks up to 1000 mm has been developed