Zobrazeno 1 - 10
of 14
pro vyhledávání: '"Yoshinari Maezono"'
Autor:
Ikuo Yamamoto, Makoto Wasamoto, Yoshinari Maezono, Atsushi Yokotani, Masahito Katto, Yousuke Iwasa
Publikováno v:
The Review of Laser Engineering. 38:774-778
Publikováno v:
The Review of Laser Engineering. 32:54-57
Publikováno v:
Le Journal de Physique IV. 11:Pr3-739
We have prepared SiO 2 and GeO 2 thin films from tetraethoxyorthosilicate (TEOS; Si(OC 2 H 5 ) 4 ) and tetraethoxyorthogermanate (TEOG: Ge(OC 2 H 5 ) 4 ), respectively, by chemical vapor deposition (CVD) assisted by high-energy photons. The photons a
Autor:
Ikuo Yamamoto, Yoshinari Maezono, Atsushi Yokotani, Makoto Wasamoto, Yousuke Iwasa, Masahito Katto
Publikováno v:
Japanese Journal of Applied Physics. 47:7266-7268
We determined that refractive index change of Ge-doped silica can be induced by vacuum ultraviolet (VUV) light irradiation from Xe2*, Kr2*, and Ar2* excimer lamps using fabricated fiber Bragg grating (FBG) in the core of the hydrogen-loaded fiber as
Autor:
Atsushi Yokotani, Kou Kurosawa, Yoshinari Maezono, Kouichi Amari, Sou Ishimura, Masahito Katto, Kiyohiko Toshikawa
Publikováno v:
Japanese Journal of Applied Physics. 46:3534-3536
In this paper, we report the deposition of silicon nitride (SiNx) films for the production of semiconductor devices and flat panel displays, by chemical vapor deposition with vacuum ultraviolet excimer lamps (VUV-CVD) using SiH4 and NH3 as raw materi
A Photochemical Process Investigation of Slica Thin Films by an Irradiation from an Ar2*Excimer Lamp
Publikováno v:
Japanese Journal of Applied Physics. 45:L944-L946
Room temperature (RT) deposition of silica thin films is available with vacuum ultraviolet (VUV) chemical vapor deposition (CVD) technique. However, the quality of the films with VUV-CVD was inferior to that with conventional methods. In this work, w
Publikováno v:
Bragg Gratings, Photosensitivity, and Poling in Glass Waveguides.
We have developed a new laser for the fabrication of FBGs without removal of polymer jackets covering fibers, and basic investigated the role of Ge concentration in the core using our developed laser.
Publikováno v:
Bragg Gratings, Photosensitivity, and Poling in Glass Waveguides.
We determined that refractive index change in the fiber’s core was induced by vacuum ultraviolet light irradiation using Xe2* and Kr2* excimer lamps and revealed the change of wavelength dependence.
Publikováno v:
Conference Digest. 2000 Conference on Lasers and Electro-Optics Europe (Cat. No.00TH8505).
Summary form only. A new photo-cleaning technique of organic contamination on silicon wafers utilizing excimer lamps has been developed. A decomposition rate of 20 /spl mu/g/min/spl middot/cm/sup 2/ has been achieved.
Autor:
Chi P. Huynh, Stephen C. Hawkins, S. Ismat Shah, Nopporn Rujisamphan, Yoshinari Maezono, Fei Deng, Chang Liu, Chaoying Ni
Publikováno v:
Applied Physics Letters. 100:213109
Surface activation of carbon nanotubes (CNTs) as forests and yarns, depolytmerization of candidate polymers, and uniform deposition and re-polymerization onto the activated CNTs are simultaneously achieved by exposing CNTs and polymer targets to ligh