Zobrazeno 1 - 10
of 27
pro vyhledávání: '"Yoshihiko Miyasaka"'
Autor:
Akira Bandoh, Fukada Keisuke, Hiroshi Osawa, Yoshihiko Miyasaka, Ishibashi Naoto, Kenji Momose
Publikováno v:
Materials Science Forum. 897:83-86
The depth profiles of n-type doping concentration in thick (>100 μm) and low-doped (< 4 × 1014 cm-3) 4H-SiC epilayers grown by chemical vapor deposition (CVD) were investigated. The variation in doping concentration during epitaxial growth are cons
Publikováno v:
Materials Science Forum. :611-614
The step-bunching dependence of the lifetime of metal–oxide–semiconductor capacitors on 4° off-axis 4H-SiC epitaxial wafers was investigated. The effects of the C/Si ratios in epitaxial growth and the substrate properties were examined. Step-bun
Autor:
Makoto Kitabatake, Takayuki Sato, Tamotsu Yamashita, Kenji Momose, Hirofumi Matsuhata, Yoshihiko Miyasaka
Publikováno v:
Materials Science Forum. :374-377
The trapezoid-shape defects are one of the most common surface defects on current 4H-SiC epitaxial film surface since they give rise negative impact for MOS-devices. We have investigated structures and origins of the defects. It is discovered that th
Autor:
Hiroshi Osawa, Takahashi Seiichi, Tamotsu Yamashita, Koji Kamei, Takayuki Sato, Kenji Momose, Yoshihiko Miyasaka, Michiya Odawara, Yoshiaki Kageshima
Publikováno v:
Materials Science Forum. :382-385
4H-SiC epitaxial wafers were prepared for the investigation of epitaxial stacking faults (SFs), for the purpose of classification and add to the epitaxial specification by PL-imaging analysis. Black colored SFs detected in PL colored images were focu
Autor:
Kenji Momose, Takayuki Sato, Yoshihiko Miyasaka, Makoto Kitabatake, Michiya Odawara, Tamotsu Yamashita, Hirofumi Matsuhata
Publikováno v:
Materials Science Forum. :585-588
Experimentally,the grazing-incident X-ray topography at different diffraction conditions, and room temperature photo-luminescence spectroscopy, various different types of stacking-faults in epitaxial films on 4-degrees-off 4H-SiC wafers were identifi
Autor:
Hirofumi Matsuhata, Makoto Kitabatake, Yoshihiko Miyasaka, Takayuki Sato, Kenji Momose, H. Ohshima, M. Sekine, Tamotsu Yamashita
Publikováno v:
Materials Science Forum. :649-652
Triangular shaped defects with obtuse-angles at tops and long bases are often observed in surfaces of epitaxial films. We have investigated the origins of them, and it became clear that these defects without clear origins were formed by contamination
Autor:
Daisuke Muto, Takayuki Sato, Makoto Kitabatake, Yoshiki Shimodaira, Kenji Momose, Kuniaki Yamatake, Tamotsu Yamashita, Yoshihiko Miyasaka, Hirofumi Matsuhata
Publikováno v:
Materials Science Forum. :363-366
We report our investigation results on triangular-defects formed on 4deg. off 4H-SiC epi- taxial wafers. Triangular-defects that had neither down-falls nor basal-plane dislocations previously reported as origins of triangular-defects at the tips of t
Publikováno v:
Japanese Journal of Applied Physics. 46:5865-5867
Detailed oscillation spectra and polarization properties have been examined in laser-diode-pumped (LD-pumped) microchip ceramic (i.e., polycrystalline) Nd:YAG lasers and the inherent segregation of lasing patterns into local modes possessing differen
Publikováno v:
Japanese Journal of Applied Physics. 45:L926-L928
Doppler particle sizing by self-mixing laser was demonstrated by using a laser-diode-pumped thin-slice Nd:GdVO4 laser with extreme optical sensitivity. A substantial improvement of optical frequency shifters led to quick and accurate sizing of Browni
Publikováno v:
BUNSEKI KAGAKU. 45:347-351
コンタクト型原子間力顕微鏡(AFM)を用いてポリオレフィンフィルムの表面粗さを測定した.試料は直鎖低密度ポリエチレンと低密度ポリエチレンのブレンド,高密度ポリエチレンと低密度ポ