Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Yoshiharu Chinone"'
Publikováno v:
Materials Science Forum. :241-246
Publikováno v:
Journal of The Electrochemical Society. 142:L214-L216
High purity chemical vapor deposition (CVD) silicon carbide fabricated by a commercial process was examined and oxidized at 1,100 C along with high purity single crystal silicon carbide. The freestanding CVD thick films had a highly textured polycrys