Zobrazeno 1 - 10
of 11
pro vyhledávání: '"Yoshiaki Tada"'
Autor:
Koichi Kusunoki, Ai Takahashi, Yoshiaki Tada, Tsuneo Okada, Shigeo Yamada, Shinsuke Nakata, Tomohisa Mukai, Ota Tsutomu
Publikováno v:
Journal of Structural and Construction Engineering (Transactions of AIJ). 71:121-127
Autor:
Shusuke Yoshitake, Kenji Ooki, Ryoichi Hirano, Toru Tojo, Yoji Ogawa, Katsuhito Ogura, Teruaki Yamamoto, Masaki Toriumi, Yoshiaki Tada
Publikováno v:
SPIE Proceedings.
Autor:
Yoshiaki Tada, Teruaki Yamamoto, Yoji Ogawa, Shusuke Yoshitake, Toru Tojo, Ryoichi Hirano, Masaki Toriumi, Kenji Ooki, Katsuhito Ogura
Publikováno v:
SPIE Proceedings.
Meeting the latest requirements of aggressive users for the advanced mask for optical lithography will be difficult. In addition, improving the productivity and throughput of the advanced mask with high-density pattern data is necessary. To overcome
Autor:
Naoharu Shimomura, Yoshio Suzuki, Kimio Suzuki, Yoshiaki Hattori, Osamu Watanabe, Souji Koikari, Kiyomi Koyama, Kenji Ooki, Ryoichi Hirano, Noboru Yamada, Hideo Kusakabe, Satoshi Yasuda, Shinsuke Nishimura, Kenji Ohtoshi, Susumu Oogi, Hiroshi Hoshino, Susumu Watanabe, Hitoshi Higurashi, Takayuki Abe, Mitsuko Shimizu, Masaki Toriumi, Shigehiro Hara, Hirohito Anze, Yasuo Suzuki, Shiro Kurasawa, Kazuo Tsuji, Shusuke Yoshitake, Tadahiro Takigawa, Tomohiro Iijima, Takashi Kamikubo, Tetsu Akiyama, Hiroaki Suzuki, Shuichi Tamamushi, Mitsuhiro Yano, Toru Tojo, Ryoji Yoshikawa, Eiji Murakami, Mitsunobu Katayama, Kazuyuki Okuzono, Munehiro Ogasawara, Akira Noma, Koji Handa, Kazuto Matsuki, Hirokazu Yamada, Noriaki Nakayamada, Kiyoshi Hattori, Yuuji Fukudome, Yoshiaki Tada, Seiichi Tsuchiya, Yoji Ogawa, Kiminobu Akeno, Hideyuki Tsurumaki
Publikováno v:
SPIE Proceedings.
Toshiba and Toshiba Machine have developed an advanced electron beam writing system EX-11 for next-generation mask fabrication. EX-11 is a 50 kV variable-shaped beam lithography system for manufacturing 4x masks for 0.15 - 0.18 micrometer technology
Autor:
Yoshiaki Tada
Publikováno v:
Journal of the Society of Mechanical Engineers. 63:192-199
Autor:
Katsumi Ohmiya, Yoshiaki Tada
Publikováno v:
Journal of the Society of Mechanical Engineers. 56:801-807
Publikováno v:
Transactions of the Japan Society of Civil Engineers. 1965:51-74
Publikováno v:
Journal of the Japan Welding Society. 30:387-393
Autor:
Yoshiaki Tada
Publikováno v:
Journal of the Society of Mechanical Engineers. 59:716-720
Publikováno v:
Nihon Naika Gakkai zasshi. The Journal of the Japanese Society of Internal Medicine. 61(9)