Zobrazeno 1 - 10
of 40
pro vyhledávání: '"Yoonyoung Jin"'
Publikováno v:
2006 GSW Proceedings.
Publikováno v:
Microsystem Technologies. 21:1395-1400
Characterization of hexagonal diamond thin films synthesized by photo-enhanced chemical vapor deposition method at 450 °C on Al/Ni coated thermally oxidized Si wafer substrates is reported here. Measurements of optical, electrical and mechanical pro
Publikováno v:
Microsystem Technologies. 21:1225-1231
Deposition of carbon nanotube and hexagonal diamond thin films at low substrate temperature with photo-enhanced chemical vapor deposition is described here. Extensive experimentation is conducted to optimize the catalyst layer utilized for deposition
Publikováno v:
Microelectronic Engineering. 114:105-111
Surface area plays an important factor in the energy conversion performance of solar cells. It has also emerged as a critical factor in the evolution of high-performance micro-electro-mechanical systems (MEMS) and multifunctional microstructures most
Publikováno v:
Microsystem Technologies. 21:65-73
In this research, a rapid prototype hydrodynamic focusing module with three multi-fluidic speed-modulating (MFSM) micropumps in micro-fluidic flow has been designed, fabricated, and characterized. The module comprises of three MFSM micropumps having
Publikováno v:
ACS Applied Materials & Interfaces. 5:5408-5412
Bucky gel is a gelatinous mixture of carbon nanotubes and an ionic liquid. This mixture was employed in fabrication of a low-voltage, rapid, and dry electroactive bimorph actuator: Bucky Gel Actuator (BGA). Feasibility studies were carried out on BGA
Publikováno v:
Diamond and Related Materials. :76-81
Synthesis of hexagonal diamond on Al/Ni coated thermally oxidized SiO2 covered Si wafer substrate with photo-enhanced chemical vapor deposition (CVD) method at 450 °C is reported here. The Raman spectroscopy on grown samples shows a 1322 cm− 1 pea
Publikováno v:
Microsystem Technologies. 14:1641-1646
A novel fabrication method involving two-step sequential backside exposures utilizing Fraunhofer diffraction is developed in this work to overcome some of the limitations of the current micro-nozzle fabrication techniques in controlling the shape and
Publikováno v:
Microsystem Technologies. 14:1451-1459
We present on a carbon nanoparticle-filled SU-8 photosensitive polymer nanocomposite for use in microelectromechanical systems (MEMS) or microsystems. Exposure and fabrication of the material was carried out using X-ray lithography. The polymer nanoc
Publikováno v:
Microsystem Technologies. 14:1285-1290
In UV-lithography, a gap between photoresist and UV-mask results in diffraction. Fresnel or near-field diffraction in thick positive and negative resists for microstructures resulting from a small gap in contact or proximity printing has been previou