Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Yoon-Min Kim"'
Autor:
Yeon-Jeong Shin, Dong Yun Shin, Chang Hyun Park, Sae Jin Hwang, Geon U Gil, Yoon Min Kim, Jeong An Kwon, Dong-Hee Lim
Publikováno v:
Journal of Korean Society of Environmental Engineers. 41:686-694
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::132478a274a5f47229532c76a04ccd06
https://doi.org/10.4491/ksee.2019.41.12.686
https://doi.org/10.4491/ksee.2019.41.12.686
Autor:
Daehan Han, Yoon-Min Kim, Aeran Hong, In-Ho Nam, Hong-Ji Lee, Min-Chul Han, Kyungseok Oh, Yongjik Park, Yong-Hyeon Kim, Tae Heon Kim
Publikováno v:
SPIE Proceedings.
Semiconductor industry has been experiencing rapid and continuous shrinkage of feature size along with Moore's law. As the VLSI technology scales down to sub 40nm process node. Control of critical dimension (CD) and Extraction of Unanticipated weak p
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f0c9769c2a883fb032e012237b891030
https://doi.org/10.1117/12.879033
https://doi.org/10.1117/12.879033