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pro vyhledávání: '"Yoon-Beak Park"'
Autor:
Yong Soo Kim, Tae-Eun Hong, Jun-Mo Yang, Yil Wook Kim, Sang-Moo Lee, Soun-Young Lee, Ju-Chul Park, Il-Sang Choi, Yoon-Beak Park
Publikováno v:
Journal of Applied Physics. 91:9788
Microstructures of W/barrier metals (TiN,WNx)/Si multilayer films followed by heat treatment were precisely investigated by x-ray diffraction and high-resolution transmission electron microscopy. The analysis results showed that in the W/TiN/Si stack
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::032bfd9574c34d2eb1c01a66a395d8bc
https://doi.org/10.1063/1.1479753
https://doi.org/10.1063/1.1479753
