Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Yongquing. Jiang"'
Publikováno v:
2006 6th World Congress on Intelligent Control and Automation.
Miniature electrode together with micro channels on silicon substrate has potential application in MEMS (Micro Electromechanic System) field. The PN junction of silicon substrate gave the limitation on the formation of miniature electrode. Discussing
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::09d48526e822f84a2a606ac8aa77b9d4
https://doi.org/10.1109/wcica.2006.1713633
https://doi.org/10.1109/wcica.2006.1713633
