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of 3
pro vyhledávání: '"Yong Pil Han"'
Autor:
Yong Pil Han, Kun Tack Lee, Woo Gwan Shim, Jeffery W. Butterbaugh, Brent D. Schwab, Sang-Yong Kim, Ron Hanestad
Publikováno v:
Solid State Phenomena. 92:203-206
Autor:
Ho Young Kim, Kun Tack Lee, Joo Tae Moon, Woo Gwan Shim, Yong Pil Han, Sang Rok Hah, Hyung Ho Ko
Publikováno v:
Solid State Phenomena. :15-18
Publikováno v:
Journal of The Electrochemical Society. 149:G477
The effects of surfactants on oxide-to-polysilicon selectivity during chemical mechanical polishing have been investigated. Slurries with nonionic surfactants such as Brij surfactants, polyethylene oxide (PEO), and ethylene oxide-propylene oxide-ethy