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pro vyhledávání: '"Yong Gen He"'
Autor:
Yong Gen He, Christian Haigermoser, Mei Sheng Zhou, Wei Lu, Huan Xin Liu, Jia Lei Liu, Feng Liu, Jin Gang Wu
Publikováno v:
Solid State Phenomena. 255:18-21
Tetramethylammonium hydroxide (TMAH) is a common etchant for Sigma shape formation in IC manufacturing. The impact of oxygen dissolved in TMAH solution on process was studied in this paper. A novel O2 gas injector was developed to improve the process
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::000add821e8a299903f62434eca1bd61
https://doi.org/10.4028/www.scientific.net/ssp.255.18
https://doi.org/10.4028/www.scientific.net/ssp.255.18
