Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Yohei Sakashita"'
Autor:
Yukiharu Maeda, Satoshi Iwata, Hirotaka Toyoda, Hideo Sugai, Yusuke Suzuki, Yohei Sakashita, Shigeru Tsunashima, Takeshi Kato
Publikováno v:
Japanese Journal of Applied Physics. 47:7879-7885
The energy distribution of energetic particles produced in magnetron sputtering plasma was measured by varying the sputtering gas species and pressure, and Co/Pt, Gd/Fe, and Co/Cu multilayers were fabricated using the same sputtering cathodes as the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4d3b61936fb5ab8deb4b5556bdcbec99
https://doi.org/10.1143/jjap.47.7879
https://doi.org/10.1143/jjap.47.7879
Autor:
Takeshi Kato, Satoshi lwata, Yusuke Takagi, Hideo Sugai, Hirotaka Toyoda, Shigeru Tsunashima, Yohei Sakashita
Publikováno v:
Transactions of the Materials Research Society of Japan. 32:481-484
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::214210309272855455982300c3fa9fa8
https://doi.org/10.14723/tmrsj.32.481
https://doi.org/10.14723/tmrsj.32.481
Publikováno v:
Vacuum. 80:581-587
Energy distribution function (EDF) of ion species (Ar + , Kr + , Xe + ) in a rare gas magnetron plasma is measured at a substrate position, 0.1 m away from the target surface, by energy-resolved mass spectrometry. The measured ion EDF contains, besid
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::aa06ae1ae7eca467eb4e18d62efdda37
https://doi.org/10.1016/j.vacuum.2005.10.001
https://doi.org/10.1016/j.vacuum.2005.10.001