Zobrazeno 1 - 10
of 42
pro vyhledávání: '"Yohannes M. Desta"'
Autor:
Yohannes M. Desta, Jost Goettert
Publikováno v:
LIGA and Its Applications
Publikováno v:
Microsystem Technologies. 13:327-334
Since the early 1990s a variety of applications ranging from precision metallic, ceramic, or polymeric parts to complex devices for micro-fluidic and micro-optic applications have been discussed with the assumption that LIGA can either make a signifi
Autor:
Daniel L. Feedback, Yohannes M. Desta, J. Weimert, Jason Guy, Mark S. F. Clarke, Varshni Singh, Jost Goettert, Proyag Datta
Publikováno v:
Microsystem Technologies. 13:369-377
Polymeric microfluidic chips are an enabling component for cost-effective, point of care analytical devices for pharmaceutical, agriculture, health, biological and medical applications. The microfluidic structures can be completed with active element
Autor:
Zhong Geng Ling, Yohannes M. Desta, Yoonyoung Jin, Varshni Singh, Jost Goettert, Proyag Datta
Publikováno v:
Journal of Physics: Conference Series. 34:912-918
Since 1995 CAMD has been offering exposure services, so called print shop for a variety of users interested in making precision High-Aspect-Ratio Microstructures (HARMST) for various application. Services have been expanded beyond only the print shop
Publikováno v:
Journal of Micromechanics and Microengineering. 16:402-406
X-ray lithography is a very good option for the fabrication of micro-devices especially when high aspect ratio patterns are required. Membrane-based x-ray masks are commonly used for high-resolution x-ray lithography. A thin layer of silicon nitride
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 23:666-670
Surface modification of silicon-containing fluorocarbon (SiCF) films achieved by wet chemical treatments and through x-ray irradiation is examined. The SiCF films were prepared by plasma-enhanced chemical vapor deposition, using gas precursors of tet
Publikováno v:
Journal of Micromechanics and Microengineering. 15:1242-1248
Although the benefits of SU-8 as a thick photoresist material for MEMS applications have been shown by various researchers, its use for ultra-thick applications (>1 mm) has been hampered by the difficulties associated with the high solvent gradient o
Publikováno v:
Journal of Micromechanics and Microengineering. 15:1249-1259
Ultra-tall (2–4 mm), densely packed arrays of high aspect ratio micro structures (HARMs) are required for a variety of heat transfer and mass transfer devices currently under development. Great success has been reported lithographically defining re
Autor:
Tao Wang, Kevin W. Kelly, D. Hensley, R.M. Lienau, A. McCandless, Zhong-geng Ling, Yohannes M. Desta
Publikováno v:
Journal of Microelectromechanical Systems. 14:400-409
This paper describes a process to fabricate monolithic multilevel high-aspect-ratio microstructures (HARMs) for ferromagnetic devices built on silicon wafers using aligned X-ray lithography in conjunction with electrodeposition. Two X-ray masks were
Autor:
Sanghoon Lee, Michael D. Bryant, Yoonyoung Jin, Daejong Kim, Jost Goettert, Y. Han, Yohannes M. Desta
Publikováno v:
Microsystem Technologies. 10:522-526
A micro corona motor was fabricated using a membraneless built-on X-ray mask. Sharp stator electrodes of this motor ionize air molecules and ionized charges transfer onto the rotor surface, resulting in rotating rotor motions by Coulomb forces. For g