Zobrazeno 1 - 2
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pro vyhledávání: '"Yiqiang Pi"'
Autor:
Zhipeng Wu, Xie Dongdong, Sixuan Xiao, Yiqiang Pi, Jing Zhang, Shiguang Li, Yinghao Yang, Chenxu Guo
Publikováno v:
Optical Metrology and Inspection for Industrial Applications V.
Scanning electron microscope (SEM) and its variations, such as critical dimension SEM (CD-SEM) and electron beam inspection (EBI-SEM), are getting increasingly critical in process control in very large-scale integration circuits (VLSI) manufacturing.
Autor:
Shiguang Li, Dongdong Xie, Zhipeng Wu, Yinghao Yang, Jing Zhang, Chenxu Guo, Yiqiang Pi, Sixuan Xiao
Publikováno v:
Proceedings of SPIE; 9/4/2018, Vol. 10819, p1-7, 7p