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Diamond-like carbon films with Ti dopant (Ti-DLC) are synthesized by reactive magnetron sputtering using a pure Ti metal target. This study determines the effect of methane flow ratios [Rm=CH4/(Ar + CH4), ranging from 4 to 12%] on the surface morphol
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6b2da384bbd73f91dcaf74ddac128cee
https://doi.org/10.21203/rs.3.rs-2820001/v1
https://doi.org/10.21203/rs.3.rs-2820001/v1
