Zobrazeno 1 - 10
of 16
pro vyhledávání: '"Ye Ko Ko Aung"'
Publikováno v:
Russian Microelectronics. 51:611-618
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::30874f7314862e085b603a9843152c97
https://doi.org/10.1134/s1063739722070150
https://doi.org/10.1134/s1063739722070150
Publikováno v:
Russian Microelectronics; Dec2023, Vol. 52 Issue 7, p690-693, 4p
Publikováno v:
Proceedings of Universities. Electronics. 25:440-451
In microelectromechanical devices and systems (MEMS), capacitive micromechanical accelerometers (MMA) are used in airbag systems, machine vibration monitoring, navigation, seismology, microgravity measurements, etc. The most important structural elem
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::61dd92889e9e20e252a15db2eff4f52c
https://doi.org/10.24151/1561-5405-2020-25-5-440-451
https://doi.org/10.24151/1561-5405-2020-25-5-440-451
Publikováno v:
Proceedings of Universities. Electronics. 25:155-166
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b01ac191937c0bd3965c109b1170dd28
https://doi.org/10.24151/1561-5405-2020-25-2-155-166
https://doi.org/10.24151/1561-5405-2020-25-2-155-166
Publikováno v:
Russian Microelectronics; Dec2022, Vol. 51 Issue 7, p611-618, 8p
Publikováno v:
Proceedings of Universities. Electronics. 24:257-266
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::673b720d998ae401f19d7208e5f07d80
https://doi.org/10.24151/1561-5405-2019-24-3-257-266
https://doi.org/10.24151/1561-5405-2019-24-3-257-266
Publikováno v:
2021 International Seminar on Electron Devices Design and Production (SED).
Modern designs of sensitive elements of many MEMS, including micromechanical accelerometers, contain suspension elements, with the help of which the inertial mass is connected to a fixed frame. The simulation was carried out using the ANSYS program,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2c7c61dd37db149986d5f4ddfdf502f4
https://doi.org/10.1109/sed51197.2021.9444538
https://doi.org/10.1109/sed51197.2021.9444538
Publikováno v:
2021 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (ElConRus).
There is a wide variety of designs of the suspensions used in capacitive micromechanical accelerometers and other MEMS. In this paper, the most common designs of silicon suspensions of the inertial mass of the sensitive element are investigated. The
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dcad92d6c9bc89f7e22f942b712cf54b
https://doi.org/10.1109/elconrus51938.2021.9396642
https://doi.org/10.1109/elconrus51938.2021.9396642
Publikováno v:
2020 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus).
The results of the influence of the diaphragm shape of a piezoresistive pressure sensor on its parameters are determined in this article. Square, rectangular and round diaphragms made of monocrystalline silicon were studied. With the help of the ANSY
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9342ee5b9f17ddae0f0dfea2805ed54c
https://doi.org/10.1109/eiconrus49466.2020.9039418
https://doi.org/10.1109/eiconrus49466.2020.9039418
Publikováno v:
2020 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus).
Using the finite element modeling in ANSYS, modeling and calculation of the main parameters of the sensitive element of a differential capacitive micromechanical accelerometer were performed. These parameters are the coefficient of elasticity of the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f192489d307b7494fd8462e64c97964a
https://doi.org/10.1109/eiconrus49466.2020.9039438
https://doi.org/10.1109/eiconrus49466.2020.9039438