Výsledky vyhledávání - "Ye, C. Win"

Conference

Determination of Ultra-shallow Junction (USJ) Quality with an Elastic Material Probe (EM-Probe).

Autor: Benjamin, Mark C., Hillard, Robert J., Ye, C. Win

Publikováno v: AIP Conference Proceedings; 2005, Vol. 788 Issue 1, p245-248, 4p

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Conference

Measurements of Ultra-Shallow Junction (USJ) Sheet Resistance with a Non-Penetrating Four Point Probe.

Autor: Hillard, Robert J., Mazur, Robert G., Alexander, William J., Ye, C. Win, Benjamin, Mark C., Borland, John O.

Publikováno v: MRS Online Proceedings Library; 2004, Vol. 810 Issue 1, p56-61, 6p

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Conference

In-line, Non-destructive Electrical Metrology of Nitrided Silicon Dioxide and High-k Gate Dielectric Layers.

Autor: Hillard, Robert J., Hung, P.Y., Chism, William, Ye, C. Win, Howland, William H., Tan, Louison C., Kalnas, Christine E.

Publikováno v: AIP Conference Proceedings; 2003, Vol. 683 Issue 1, p796-801, 6p

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Akademický článek

Modeling of ultrashallow spreading resistance probe calibration curves.

Autor: Hillard, R. J., Ramey, S. M., Ye, C. Win

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2000, Vol. 18 Issue 1, p389-392, 4p

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