Zobrazeno 1 - 10
of 11
pro vyhledávání: '"Yazan M. Al-Rawashdeh"'
Publikováno v:
IEEE Transactions on Automation Science and Engineering. 20(1):718-732
The operation time of an ideal reliable wafer scanner model is defined at the die level where the actual exposure process takes place as the time unit per die, or at the wafer substrate level as the time unit per wafer substrate. Therefore, the machi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6249d0df7fc0fe368bd2d8bb0dc6dd49
https://research.tue.nl/en/publications/28058a7f-12d1-45ab-8d27-f1040a012a6a
https://research.tue.nl/en/publications/28058a7f-12d1-45ab-8d27-f1040a012a6a
Publikováno v:
Mechanical Systems and Signal Processing, 186:109769. Academic Press Inc.
We present a framework that allows designing point-to-point closed-form trajectories and identifying flexible modes, jointly. The impulse response of a k-cascaded second-order notch filter is altered by composing it with a polynomial function of even
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::66d04edc19117fda5dd498b1b4a45567
https://research.tue.nl/nl/publications/62abcd34-6fbc-4318-83a2-c154733b6ea6
https://research.tue.nl/nl/publications/62abcd34-6fbc-4318-83a2-c154733b6ea6
Publikováno v:
Mechanism and Machine Theory, 170:104638. Elsevier
In this paper, we present a dynamics modeling approach for lithographic machines. These machines consist of N-open chains with multiple stages in each chain. A stage can suppress or exert motion in specific directions. The stages affect each other th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::326bfb90f347c8be4ef5f962a7278c37
https://research.tue.nl/en/publications/b87259fd-4742-4f4b-b73d-68b6393d0fa0
https://research.tue.nl/en/publications/b87259fd-4742-4f4b-b73d-68b6393d0fa0
Publikováno v:
IEEE Transactions on Control of Network Systems. 7:734-746
In this investigation, a unifying framework for designing distributed linear-like and nonlinear state-dependent protocols to control the behavior of the multiagent systems over communication networks is presented. Various behaviors of the connected a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::28a920a1c2c4cd61249c553dd9cb8595
https://doi.org/10.1109/tcns.2019.2940264
https://doi.org/10.1109/tcns.2019.2940264
Publikováno v:
2021 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0689113c984308c4d213be73d66c5c69
https://doi.org/10.1109/iros51168.2021.9636016
https://doi.org/10.1109/iros51168.2021.9636016
Publikováno v:
ACC
2021 American Control Conference, ACC 2021, 40-47
STARTPAGE=40;ENDPAGE=47;TITLE=2021 American Control Conference, ACC 2021
2021 American Control Conference, ACC 2021, 40-47
STARTPAGE=40;ENDPAGE=47;TITLE=2021 American Control Conference, ACC 2021
A flexural hinge-based fine stage mechanism is proposed to compensate micro-positioning errors in semi-conductor manufacturing motion systems, i.e. lithography machines. To assess the performance of the proposed fine stage, as an end-stage in the lit
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::efa5b25ec4ce28f853df94e075baaacc
https://doi.org/10.23919/acc50511.2021.9483343
https://doi.org/10.23919/acc50511.2021.9483343
Publikováno v:
CCTA 2021-5th IEEE Conference on Control Technology and Applications, 1089-1094
STARTPAGE=1089;ENDPAGE=1094;TITLE=CCTA 2021-5th IEEE Conference on Control Technology and Applications
STARTPAGE=1089;ENDPAGE=1094;TITLE=CCTA 2021-5th IEEE Conference on Control Technology and Applications
In this paper, we present an extension of our work on the characterization of lithography machines. So far, the machine was approximated using three open chains, reticle, optics and wafer chains, all sharing one common root. In general, the performan
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::590b1b78cec33bafeb7ba44cf6166e39
https://research.tue.nl/nl/publications/bb219362-6391-4ecf-ad9c-d3181d26add6
https://research.tue.nl/nl/publications/bb219362-6391-4ecf-ad9c-d3181d26add6
Publikováno v:
2019 10th International Conference on Information and Communication Systems (ICICS).
In this paper, a robust full-car active suspension system is designed. All parameters involved, except those related to the chassis of the car, are considered uncertain and the center of gravity position is assumed to be fixed. The resulting uncertai
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::943a3971ce93d280bd43754dfb64c105
https://doi.org/10.1109/iacs.2019.8809167
https://doi.org/10.1109/iacs.2019.8809167
Publikováno v:
Applied Mechanics and Materials. 829:103-109
Linear accelerometers can be used to retrieve the angular motion of the body they are attached to if their measurements are handled in an appropriate way. In this paper, an 18-accelerometer configuration is used to facilitate angular motion determina
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7c887fa01c23372ba2b849935d76f8a2
https://doi.org/10.4028/www.scientific.net/amm.829.103
https://doi.org/10.4028/www.scientific.net/amm.829.103
Publikováno v:
2017 IEEE Sensors Applications Symposium (SAS).
In this paper, the measurements alignment of distributed inertial measurement units based on all-accelerometer is presented. These inertial measurement units, or nodes, relate to each other via an ideal sensor network. A prime master node is used as
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::aab6221a60f9d5f6e83c2a5ccfb63d2a
https://doi.org/10.1109/sas.2017.7894060
https://doi.org/10.1109/sas.2017.7894060