Zobrazeno 1 - 10
of 45
pro vyhledávání: '"Yasushi Tomizawa"'
Publikováno v:
Journal of Advanced Mechanical Design, Systems, and Manufacturing, Vol 7, Iss 1, Pp 15-29 (2013)
Precise processes or devices utilizing scanning nanoprobes, e.g., probe-based nanolithography and probe-based data storage, are state-of-the-art technologies that can handle nm-sized tiny patterns. To transfer these technologies from the research and
Externí odkaz:
https://doaj.org/article/407a592209b243a6bcbfdf02174a56b9
Publikováno v:
Nihon Kikai Gakkai ronbunshu, Vol 81, Iss 825, Pp 14-00504-14-00504 (2015)
In this paper, we demonstrate the improvement in drawing stability and throughput of scanning probe lithography (SPL) based on anti-wear probes. In order to improve the stability of SPL, we conceive of a novel anti-wear probe to improve the wear resi
Externí odkaz:
https://doaj.org/article/d742230ccc2b4fb4b1c3b76582d9cf3e
Autor:
Kei Masunishi, Etsuji Ogawa, Daiki Ono, Fumito Miyazaki, Hiroki Hiraga, Kengo Uchida, Jumpei Ogawa, Hideaki Murase, Yasushi Tomizawa
Publikováno v:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9d85c099ca5c2741e7c1b12be1444517
https://doi.org/10.1109/mems49605.2023.10052125
https://doi.org/10.1109/mems49605.2023.10052125
Autor:
Kei Masunishi, Etsuji Ogawa, Ryunosuke Gando, Daiki Ono, Shiori Kaji, Fumito Miyazaki, Hiroki Hiraga, Kenga Uchida, Yasushi Tomizawa
Publikováno v:
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::29d4f0e994214d081d33422ea5f27363
https://doi.org/10.1109/mems51670.2022.9699761
https://doi.org/10.1109/mems51670.2022.9699761
Autor:
Hiroki Hiraga, Etsuji Ogawa, Yasushi Tomizawa, Tetsuro Itakura, Kei Masunishi, Hiroshi Ota, Fumito Miyazaki, Daiki Ono, Ryunosuke Gando, Shiori Kaji
Publikováno v:
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers).
This paper presents the first silicon MEMS rate integrating gyroscope (RIG) module capable of detecting the Earth's rotation directly in angle output. The new 5-cm module includes a high frequency if = 11.4 kHz) donut-mass gyroscope (DMG) resonator s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6a4452d8dfca807735ff07839e0a5c11
https://doi.org/10.1109/transducers50396.2021.9495598
https://doi.org/10.1109/transducers50396.2021.9495598
Publikováno v:
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL).
This paper presents the first experimental demonstration of trajectory estimation using a mobile MEMS rate integrating gyroscope (RIG) module. The RIG module provides direct information of rotation angle to estimate the position, which eliminates the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9aa1c95b613c711c535279c426dd54eb
https://doi.org/10.1109/inertial48129.2020.9090025
https://doi.org/10.1109/inertial48129.2020.9090025
Autor:
Ryunosuke Gando, Kei Masunishi, Shiori Kaji, Hiroki Hiraga, Etsuji Ogawa, Yasushi Tomizawa, Fumito Miyazaki, Hideki Shibata
Publikováno v:
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS).
This paper experimentally demonstrates a donut-mass gyroscope (DMG) with the highest frequency-matching temperature stability reported to date for a MEMS rate integrating gyroscope (RIG). The DMG features a donut-like rigid mass suspended on a single
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::da192f39033832bc76e66bf56f996bc9
https://doi.org/10.1109/mems46641.2020.9056333
https://doi.org/10.1109/mems46641.2020.9056333
Publikováno v:
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS).
This paper presents the first microcontroller-based module-level MEMS rate integrating gyroscope (RIG) for direct angle measurement after automatic asymmetry calibration. The 5-cm prototype module integrates a vacuum-sealed donut-mass gyroscope devic
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::78fce2b9a1eed22c6df71b5d771376f9
https://doi.org/10.1109/mems46641.2020.9056317
https://doi.org/10.1109/mems46641.2020.9056317
Autor:
null Daiki ONO, Kei MASUNISHI, Etsuji OGAWA, Ryunosuke GANDO, Hiroki HIRAGA, Kengo UCHIDA, Shiori KAJI, Fumito MIYAZAKI, Hiroshi OTA, Tazuko TOMIOKA, Tetsuro ITAKURA, Yasushi TOMIZAWA
Publikováno v:
The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP. 2022:IIP1R3-I11
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2b1ba4ac5524b3370e33adbd32be9def
https://doi.org/10.1299/jsmeiip.2022.iip1r3-i11
https://doi.org/10.1299/jsmeiip.2022.iip1r3-i11
Autor:
Fumito MIYAZAKI, Ryunosuke GANDO, Daiki ONO, Shiori KAJI, Hiroshi OTA, Hiroki HIRAGA, Kei MASUNISHI, Etsuji OGAWA, Tetsuro ITAKURA, Kengo UCHIDA, Yasushi TOMIZAWA
Publikováno v:
The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP. 2022:IIP1R1-E01
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6686627cdebc97ebe1889afa256cb026
https://doi.org/10.1299/jsmeiip.2022.iip1r1-e01
https://doi.org/10.1299/jsmeiip.2022.iip1r1-e01