Zobrazeno 1 - 10 of 21 pro vyhledávání: '"Yasushi Toma"'
1
Application of Electrochemical Machining in Ultrapure Water to Copper Damascene Process
Autor: Hidekazu Goto, Kenichi Morita, Itsuki Kobata, Kikuji Hirose, Yasushi Toma, Yuzo Mori
Publikováno v: Journal of the Japan Society for Precision Engineering, Contributed Papers. 70:666-670
The electrochemical machining in ultrapure water has been applied to copper etch back process in damascene process. This application is expected to have many merits compared to CMP(Chemical Mechanical Polishing) which is the conventional etch back pr
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::00160e808c84851074103030012cf8f7
https://doi.org/10.2493/jspe.70.666
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3
A Study on Electrochemical Machining Method in Ultrapure Water. Electrochemical Machining of Cathode Surface
Autor: Yasushi Toma, Yuzo Mori, Kikuji Hirose, Taketo Nishimura, Itsuki Kobata, Hidekazu Goto
Publikováno v: Journal of the Japan Society for Precision Engineering. 68:1241-1245
In order to develop a new ultra-precision and ultra-clean machining method, we studied electrochemical machining in ultrapure water. In this paper, we newly performed electrochemical machining in ultrapure water under the cathode specimen condition t
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::d68642f5e6679cfec3be0dc3f75025dc
https://doi.org/10.2493/jjspe.68.1241
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4
A Study on Electrochemical Machining Method in Ultrapure Water. Etching Process of Hydrogen-Terminated Si(001) Surface Atom by Hydroxyl Function
Autor: Yasushi Toma, Kikuzi Hirose, Hidekazu Goto, Yuzo Mori, Itsuki Kobata
Publikováno v: Journal of the Japan Society for Precision Engineering. 67:1169-1174
In order to reveal the mechanism of the electrochemical etching process in ultrapure water, first-principles molecular-dynamics simulations for the etching process of hydrogen-terminated Si(001) surfaces interacting with OH molecules were carried out
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::d75852a3f17eb4c18c2457277bf45e94
https://doi.org/10.2493/jjspe.67.1169
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6
A Study on Electrochemical Machining Method in Ultrapure Water. First-Principles Molecular-Dynamics Simulations for Etching Process of Hydrogen-Terminated Si(001) Surface by Hydroxyl Ions
Autor: Yuzo Mori, Itsuki Kobata, Hidekazu Goto, Yasushi Toma, Kikuzi Hirose
Publikováno v: Journal of the Japan Society for Precision Engineering. 67:1159-1163
In order to reveal the mechanism of the electrochemical etching process in ultrapure water, first-principles molecular -dynamics simulations for etching process of the hydrogen-terminated Si(001) surfaces by hydroxyl ion in ultrapure water were carri
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::20953994c9390771fe63564900bd1180
https://doi.org/10.2493/jjspe.67.1159
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7
A Study on Electrochemical Machining Method in Ultrapure Water. Chemical Reaction Process of Si(001) Anode Surface
Autor: Yasushi Toma, Kikuzi Hirose, Yuzo Mori, Itsuki Kobata, Hidekazu Goto
Publikováno v: Journal of the Japan Society for Precision Engineering. 67:1438-1442
In order to reveal the mechanism of the electrochemical machining process in ultrapure water, first-principles molecular-dynamics simulations of Si(001) surfaces interacting with OH molecules were carried out on the basis of the Kohn-Sham local-densi
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::df4a34a42c130d0951be41983a6c7a54
https://doi.org/10.2493/jjspe.67.1438
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9
A Study on Electrochemical Machining Method in Ultrapure Water. First-Principles Molecular-Dynamics Simulations for Etching Process of Si(001) Cathode Surface
Autor: Hidekazu Goto, Yuzo Mori, Yasushi Toma, Takashi Inada, Kikuji Hirose, Itsuki Kobata
Publikováno v: Journal of the Japan Society for Precision Engineering. 67:1680-1686
In order to reveal the mechanism of the electrochemical processes of cathode surfaces in ultrapure water, first-principles molecular-dynamics simulations of chemical reaction on the Al(001) surfaces interacting with H atoms, H2O molecules and OH mole
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::2e522eeaaf863021e52686c842736c8f
https://doi.org/10.2493/jjspe.67.1680
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10
Portal Angioechography. Its Usefulness in Localizing the Hepatic Tumor
Autor: Yasushi Toma
Publikováno v: The Japanese Journal of Gastroenterological Surgery. 26:2589-2596
肝区域, 区域間境界を摘出することで肝腫瘍存在区域を正確に把握することを目的として, 門脈枝内炭酸ガス注入による経門脈アンジオエコー法を考案し, 肝切除予定の肝細胞癌症例31例
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::e596d7c8117e6c932f39133e28d97a8a
https://doi.org/10.5833/jjgs.26.2589
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