Zobrazeno 1 - 10 of 13 pro vyhledávání: '"Yasushi Naitoh"'
5
Charge Buildup in Magnetized Process Plasma
Autor: Yoshihiro Todokoro, Hiroyuki Okada, Yasushi Naitoh, Morio Inoue, Takashi Namura
Publikováno v: Japanese Journal of Applied Physics. 30:1576
The charge buildup in a magnetron etcher has been studied experimentally for two different magnet arrangements and theoretically on the basis of an equivalent circuit model. Wafer charging measured with a metal-Si3N4-SiO2-Si (MNOS) capacitor is negat
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::dc3c9ad7ae469c67f90f211eb0547742
https://doi.org/10.1143/jjap.30.1576
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6
Experimental and Theoretical Study of the Charge Build-Up in an ECR Etcher
Autor: Morio Inoue, Takashi Namura, Yoshihiro Todokoro, Yasushi Naitoh, Hiroyuki Okada
Publikováno v: Japanese Journal of Applied Physics. 29:2251
The charge build-up in an electron cyclotron resonance (ECR) etcher has been studied experimentally and theoretically. The experimental results show that the charge build-up profiles of the wafer are convex and positive, and are detected only when th
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::a3c66e10299d90a480f6ab4c5ce7e785
https://doi.org/10.1143/jjap.29.2251
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9
Vascular Reactivity in Rats on Various Diets
Autor: Yukio Yamori, Akira Ooshima, Yasushi Naitoh, Jun Fujikawa, Ryoichi Horie, Yoshinori Nishiguchi, Yasuo Nara, Michiya Ohtaka
Publikováno v: Japanese Heart Journal. 20:740-740
SHRSP fed on the high protein diet showed significantly higher vascular reactivity than those fed on the high fat-cholesterol diet as determined by response in mean pressure, while response in pulse pressure showed the inverse relationship, indicatin
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::7044a857fe581b9592baa34671d3e611
https://doi.org/10.1536/ihj.20.740
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10
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Plný text Recenzováno Digitální knihovna AV ČR
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