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pro vyhledávání: '"Yasushi, ICHIHARA"'
Publikováno v:
上越教育大学研究紀要 = Bulletin of Joetsu University of Education. 41(1):225-234
Publikováno v:
Optomechatronic Systems III.
We have developed a system for measuring the radius of curvature of a micro spherical surface whose radius is several 10 μm to several 100 μm. This measuring system can measure a spherical surface by two methods, namely a Linnik micro-interferomete