Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Yasuhisa, Iwata"'
Autor:
Sendelbach, Matthew J., Schuch, Nivea G., Grechin, Sveta, Katz, Shlomit, Maeda, Kei, Hirasawa, Tsumugi, Otsubo, Hisashi, Aoki, Seigo, Takahashi, Atsushi, Miyafuji, Atsushi, Manos, Ofer, Yang, Yu, Levinson, Tal, Trifon, Ran, Yehuda, Dor, Hagaze, Hamode, Lamhot, Yuval, Vardi, Yair, Grauer, Yoav, Safrani, Avner, Kato, Cindy, Yasuhisa, Iwata, Koichi, Imura, Kosuke, Ito, Masanobu, Hayashi, An, Eunjoong, Lan, Nana, Ahn, Simon, Gutman, Nadav
Publikováno v:
Proceedings of SPIE; April 2024, Vol. 12955 Issue: 1 p129552P-129552P-10, 12825659p
Autor:
Xiaolei Liu, Yoav Grauer, Raviv Yohanan, Mark Ghinovker, Diana Shaphirov, Yasuhisa Iwata, Koichi Imura, Kosuke Ito
Publikováno v:
Metrology, Inspection, and Process Control XXXVI.
Autor:
Hiroyuki Kurita, Atsushi Ueno, Michael E. Adel, Jorge M. Poplawski, Kouichirou Tsujita, Yasuhisa Iwata, Mark Ghinovker, Elyakim Kassel
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XVIII.
Isolated and dense patterns were formed at process layers from gate through to back-end on wafers using a 90 nm logic device process utilizing ArF lithography under various lithography conditions. Pattern placement errors (PPE) between AIM grating an
Autor:
Robinson, John C., Sendelbach, Matthew J., Katz, Shlomit, Roy, Nikhil Aditya Kumar, McCandless, Steve, Reece, Jason, Gillespie, Nathan, Monserud, Nils, Grauer, Yoav, Stakely, Mark, Gray, Greg, Li, Yonglei, Kimani, Peter, Park, Nahee, Yasuhisa, Iwata, Koichi, Imura, Kosuke, Ito, Zhang, Yuqian
Publikováno v:
Proceedings of SPIE; April 2023, Vol. 12496 Issue: 1 p1249613-1249613-8
Autor:
Liu, Xiaolei, Grauer, Yoav, Yohanan, Raviv, Ghinovker, Mark, Shaphirov, Diana, Yasuhisa, Iwata, Koichi, Imura, Kosuke, Ito, Gao, Xindong
Publikováno v:
Proceedings of SPIE; 1/20/2022, Vol. 12053, p1205322-1205322, 1p
Autor:
Robinson, John C., Sendelbach, Matthew J., Liu, Xiaolei, Grauer, Yoav, Yohanan, Raviv, Ghinovker, Mark, Shaphirov, Diana, Yasuhisa, Iwata, Koichi, Imura, Kosuke, Ito, Gao, Xindong
Publikováno v:
Proceedings of SPIE; May 2022, Vol. 12053 Issue: 1 p1205322-1205322-7
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