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A modular process for integrating thick polysilicon MEMS devices with sub-micron CMOS.

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Electrostatic Charge and Field Sensors Based on Micromechanical Resonators.

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Silicon-based highly-efficient fiber-to-waveguide coupler for high index contrast systems.

Autor: Nguyen, Victor, Montalbo, Trisha, Manolatou, Christina, Agarwal, Anu, Ching-yin Hong, Yasaitis, John, Kimerling, L. C., Michel, Jurgen

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