Zobrazeno 1 - 10
of 27
pro vyhledávání: '"Yang, Baorui"'
Publikováno v:
In Chemical Engineering Journal 1 November 2024 499
Extreme ultraviolet lithography reticle local CD uniformity correlation to wafer local CD uniformity
Autor:
Kasprowicz, Bryan S., Liang, Ted, Lyons, Adam, Wallow, Tom, Nam, Dong-Seok, Yoon, Gisung, Yang, Baorui, Hermes, Mike
Publikováno v:
Proceedings of SPIE; December 2022, Vol. 12293 Issue: 1 p122930M-122930M-12, 12170083p
Publikováno v:
Journal of Chemical Physics; 1/15/1995, Vol. 102 Issue 3, p1188, 4p
Autor:
Chiu, Yu-hui, Yang, Baorui, Fu, Hungshin, Anderson, Scott L., Schweizer, Martin, Gerlich, Dieter
Publikováno v:
Journal of Chemical Physics; 4/15/1992, Vol. 96 Issue 8, p5781, 8p
Publikováno v:
Journal of Chemical Physics; 9/1/1991, Vol. 95 Issue 5, p3275, 8p
Publikováno v:
Journal of Chemical Physics; 5/15/1991, Vol. 94 Issue 10, p6459, 10p
Publikováno v:
Journal of Chemical Physics; 6/15/1990, Vol. 92 Issue 12, p7356, 9p
Publikováno v:
Journal of Chemical Physics; 2/1/1989, Vol. 90 Issue 3, p1577, 11p
Publikováno v:
Journal of Chemical Physics; 11/1/1988, Vol. 89 Issue 9, p5527, 8p
Publikováno v:
Proceedings of SPIE; 9/18/2022, Vol. 12293, p122930M-122930M-12, 1p