Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Yamaguchi, Richard"'
Optical coupling of lens, liquid and resist in immersion lithography: rigorous model and assessment.
Autor:
Cheng, MoSong, Ho, Benjamin C. P., Yamaguchi, Richard, Yoshioka, Kazutoshi, Yaegashi, Hidetami
Publikováno v:
Proceedings of SPIE; Nov2004, Issue 1, p405-414, 10p
Autor:
Ho, Benjamin C. P., Guenther, Doug, Cheng, Mosong, Sotoodeh, Ken, Rudack, Anne, Yamaguchi, Richard, Brown, Bob, Ickes, Marcus, Nafus, Kathleen
Publikováno v:
Proceedings of SPIE; Nov2003, Issue 1, p1229-1241, 13p
Autor:
Giger, Urs, Harvey, John W., Yamaguchi, Richard A., McNulty, Patricia K., Chiapella, Ann, Beutler, Ernest
Publikováno v:
Blood; February 1985, Vol. 65 Issue: 2 p345-351, 7p
Publikováno v:
American Journal of Physics; August 1971, Vol. 39 Issue: 8 p920-923, 4p